Characteristics of Hardness and Elastic Modulus of PMMA Film using Nano-Tribology

Evaluation method of characteristics of Al2O3 coating materials

“…In terms of the coating materials of vacuum components for semiconductor equipment, oxide materials such as Al 2 O 3 are commonly used. Among coating methods for the surface of vacuum components of semiconductor equipment, electrolytic polishing, anodizing, and plasma spray are widely used [6]. Because of the almost absence of an evaluation method for film coatings, however, there have been many difficulties in practice.…”