Characteristics of carbon films prepared by plasma-based ion implantation

Liao, Jiaxuan; Liu, W.M.; Xu, Tao; Xue, Qunji

doi:10.1016/j.carbon.2003.11.013

Cited by 60 publications

(30 citation statements)

References 27 publications

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“…According to refs. [27,32], C1s can be decomposed into two peaks (~284.3 and ~285.2 eV), which correspond to sp 2 C-C and sp 3 C-C. Intensity ratio of these two peaks corresponds to content ratio of sp 2 and sp 3 .…”

Section: Resultsmentioning

confidence: 99%

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Extraordinary self-lubrication properties of non-hydrogenated diamond-like carbon films under humid atmosphere

Feng

et al. 2008

Sci. China Ser. E-Technol. Sci.

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Tribological properties of non-hydrogenated diamond-like carbon (DLC) films were investigated under humid (RH=80%) and dry (RH=5%) air. These films were deposited by pulsed laser deposition (PLD) at different substrate temperatures. Tribological properties of DLC fabricated by PLD is not sensitive to the relative humidity of testing environment. Because of the unique growth mechanism of DLC prepared by PLD, DLC is of "soft-hard" double layers, having a very low friction coefficient and wear rate under humid atmosphere. The minimum coefficient and wear rate of film under humid circumstance are 0.045 and 5.94×10 −10 mm 3 N −1 m −1 , respectively, just a little bit more than those under dry condition. The root means square roughness of film is less than 1 nm. The sp 3 content of film grown at room temperature (RT) is 72%, and the sp 3 content decreases with temperature. Raman spectrum shows that the micro-structure is amorphous network. The largest hardness and elastic modulus of film are 51 GPa and 350 GPa, respectively and they reduce with increase of deposition temperature too. Water contact angles on surface are more than 90° which indicates that films fabricated by PLD are hydrophobic with low surface energy.pulsed laser deposition (PLD), non-hydrogenated diamond-like carbon (DLC), relative humidity, double layer, friction coefficient, wear rate Diamond-like carbon (DLC) films are widely applied in many fields such as MEMS devices, aviation and the mechanical industries for its excellent physical and chemical properties, such as self-lubrication under oilless conditions, high hardness and elastic modulus and chemical inertness [1][2][3] . Low friction coefficients (<0.05) of DLC film are susally obtained from three main methods: (1) measure in vacuum or dry air or N 2 atmosphere (RH<5%) [4][5][6][7][8][9][10] ; (2) hydrogenated DLC film is used to gain low coefficient [4,5,[11][12][13] ; (3) micro-load (millinewton range), little displacement (micron range) and very slow sliding speed (<10 mm/s) are employed in the process of tribological test [10,14,15] . However, previous studies have shown that the friction and wear properties of DLC films are strongly dependent on the nature of the films and on the deposition methods, component of DLC film, and are very sensitive to the testing environment, especially to the relative humidity (RH) [4,[16][17][18][19] . Dimigen [20] found that humidity would greatly affect the friction coefficient, and it was 0.01-0.02 while RH<1%, however it increased up to 0.2 with humidity RH=100%. Though there were many tribological studies of DLC films under humid circumstances (RH>50%), research results showed that it was difficult to obtain and keep low friction coefficient (<0.05) for a long duration [6][7][8]18,[21][22][23] .There are so many works about tribological properties of DLC film, but most of these DLC films were fabri-

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Section: Resultsmentioning

confidence: 99%

“…The intensity ratio of G peak and D peak (I g /I d ) indicates that sample 1# is amorphous tetrahedral DLC (ta-DLC) with high sp 3 content [26] . With increasing temperature, Raman peak becomes wider and the obvious double-peak appears, which indicates that sp 3 content decreases with deposition temperature [27][28][29][30][31] .…”

Section: Resultsmentioning

confidence: 99%

Extraordinary self-lubrication properties of non-hydrogenated diamond-like carbon films under humid atmosphere

Feng

et al. 2008

Sci. China Ser. E-Technol. Sci.

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“…The C1s spectrum in the XPS analysis is the most useful in identifying the chemical states of the a-C films. Containing the C=C (sp 2 bond) peak at *284.4 eV and C-C (sp 3 bond) peak at *285.2 eV, as well as the C-O peak at *286.8 eV, and a carbonyl C=O peak at *288.5 eV, the C1s spectrum peak of a-C film was shown as a broad bond [26,27]. The broad core-level XPS C1s spectrum of the asdeposited GLC film was shown in Fig.…”

Section: Microstructure Of Nanocomposite Glc Filmsmentioning

confidence: 99%

Nanocomposite Microstructure and Environment Self-Adapted Tribological Properties of Highly Hard Graphite-Like Film

Wang

et al. 2010

Tribol Lett

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Graphite-like carbon (GLC) nanocomposite films were fabricated by DC magnetron sputtering using high pure graphite target at ambient temperature. Raman spectroscopy and X-ray photoelectron spectroscopy (XPS) investigation showed that the as-deposited GLC films have high concentration of sp 2 -hybridized carbon. High-resolution transmission electron microscopy (HRTEM) images and selected area diffraction patterns (SADP) indicated a complex nanocomposite microstructure of the GLC films. As well as nanocrystalline graphite, a face-center cubic (fcc) diamond with a grain size in the range of 3-8 nm were dispersed in the amorphous carbon matrix inhomogenously and integrally. The nanocomposite GLC film had high hardness of 23 GPa, which was attributed to the mutual strengthening effect of nanoparticles and amorphous matrix. More importantly, the as-deposited nanocomposite GLC film exhibited excellent self-adapted tribological properties in different environments of ambient air, different relative humidity and water. The friction coefficients were 0.053 in ambient air and 0.046 in distilled water, while specific wear rates were 4.5 9 10 -16 m 3 N -1 m -1 and 1.6 9 10 -16 m 3 N -1 m -1 , respectively. The friction regimes and mechanisms in different environments were elaborated. This film is foreseen to high potential in protecting and solid lubricating material in humidity or water environment.

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“…[20][21][22] Notably, C-F bonds disappear in the C 1s XPS spectrum for S4 and S5. The sp 2 and sp 3 carbon contents for these five coatings are listed in Table 2.…”

Section: Characterization Of As-fabricated Carbon-based Coatingsmentioning

confidence: 94%

Microstructure and tribological behavior via modified F and Si content in duplex (F:Si)-doped carbon-based coatings

Zhang

2015

Surf. Interface Anal.

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In this paper, the amorphous carbon-based coatings containing F and Si (a-C:F:Si) are successfully fabricated using a plane hollow cathode plasma-enhanced chemical vapor deposition method. The results show that the mechanical properties of these coatings, such as hardness, elastic modulus, friction and wear, are closely affected by the content of F and Si. We systematically examine the microstructure and composition of these coatings using SEM, XPS, AFM and Raman for understanding of the underlying frictional mechanism.

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Characteristics of carbon films prepared by plasma-based ion implantation

Cited by 60 publications

References 27 publications

Extraordinary self-lubrication properties of non-hydrogenated diamond-like carbon films under humid atmosphere

Extraordinary self-lubrication properties of non-hydrogenated diamond-like carbon films under humid atmosphere

Nanocomposite Microstructure and Environment Self-Adapted Tribological Properties of Highly Hard Graphite-Like Film

Microstructure and tribological behavior via modified F and Si content in duplex (F:Si)-doped carbon-based coatings

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