Characteristics of a Kilowatt-Plus Helium Microwave-Induced Plasma Utilizing 2- and 3-cm-Depth TM<sub>010</sub> Resonator Cavities

Wu, Mingin; Carnahan, Jon W.

doi:10.1366/0003702924444489

Cited by 25 publications

(5 citation statements)

References 17 publications

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“…The electron density is lower that for the He-CMP (4 3 10 14 /cm 3 ) 9 and He-Kip-M IP (9.6 3 10 14 /cm 3 ), 8 but higher than that reported for a He-IC P (1.2 3 10 14 /cm 3 ). 21 The excitation temperature is higher than that reported for He-CM P (3400 K), 9 He-Kip-M IP (4600 K), 8 and He-ICP (4300 K). 21 These results are summarized in Table I.…”

Section: Resultsmentioning

confidence: 57%

“…1 However, existing He-MIPs, including the Beenakker cavity, [2][3][4] the surfatron, 5 and the m icrowave plasma torch (MPT), 6 have low tolerance to aqueous solution samples, 7 because the input microwave power is limited up to 500 W. The low-power M IP does not provide suf cient plasma energy to both desolvate and ionize the elemental mass from the directly nebulized sample solution. More recently, the kilowatt-plus-MIP (Kip-MIP) 8 and capacitively coupled m icrowave plasm a (CM P) 9 were developed. Because these He-MIPs are of high power (Kip-MIP: 1600 watt; CM P: ; 1000 W ), the detection limits were low [for example, He Kip-MIP; Cl(II) (479.5 nm): 2.2 ppm (mg/mL)], 8 and the expected analytical performance is m ore effective than that of low-power M IPs.…”

Section: Introductionmentioning

confidence: 99%

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Characteristics of a High-Power Microwave-Induced Helium Plasma at Atmospheric Pressure for the Determination of Nonmetals in Aqueous Solution

Yamada

2001

Appl Spectrosc

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A high-power [∼ 1000 W continuous wave (CW), 2.45 GHz] annular-shaped microwave-induced helium plasma (He-MIP) was developed for the determination of nonmetals in aqueous solutions, and the characteristics are presented. The plasma was generated at atmospheric pressure by an Okamoto cavity that was modified to focus the energy. No external cooling was used to stabilize the plasma. An aqueous solution was injected into the plasma by an ultrasonic system with desolvation and condensation. The electron density and iron-excitation temperature were on the order of 1014/cm3 and 5000 K, respectively. Introduction of aqueous chloride in the form of NaCl and bromide in the form of KBr produced intense ion emission, and detection limits of 100 ppb for Cl(II) (479.5 nm) and 200 ppb for Br(II) (470.5 nm) were obtained.

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Section: Resultsmentioning

confidence: 57%

Section: Introductionmentioning

confidence: 99%

Characteristics of a High-Power Microwave-Induced Helium Plasma at Atmospheric Pressure for the Determination of Nonmetals in Aqueous Solution

Yamada

2001

Appl Spectrosc

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“…A cylindrical cavity operating in the TM 010 mode (Beenakker cavity) is widely used in microwave plasma generators [59][60][61][62][63][64] (figure 5(b)). In this case, the resonance frequency does not depend on the height of the cavity and reducing it gives the possibility of obtaining plasma at small values of the incident power.…”

Section: Microwave Cavity Dischargesmentioning

confidence: 99%

Microwave discharges at low pressures and peculiarities of the processes in strongly non-uniform plasma

Lebedev

2015

Plasma Sources Sci. Technol.

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Microwave discharges (MD) are widely used as a source of non-equilibrium low pressure plasma for different applications. This paper reviews the methods of microwave plasma generation at pressures from 10 −2 approximately to 30 kPa with centimeter-millimeter wavelength microwaves on the basis of scientific publications since 1950 up to the present. The review consists of 16 sections. A general look at MDs and their application is given in the introduction, together with a description of a typical block-schema of the microwave plasma generator, classification of MD, and attractive features of MD. Sections 2-12 describe the different methods of microwave plasma generators on the basis of cavity and waveguide discharges, surface and slow wave discharges, discharges with distributed energy input, initiated and surface discharges, discharges in wave beams, discharges with stochastically jumping phases of microwaves, discharges in an external magnetic field and discharges with a combination of microwave field and dc and RF fields. These methods provide the possibility of producing nonequilibriun high density plasma in small and large chambers for many applications. Plasma chemical activity of nonequilibrium microwave plasma is analyzed in section 13. A short consideration of the history and status of the problem is given. The main areas of microwave plasma application are briefly described in section 14. Non-uniformity is the inherent property of the majority of electrical discharges and MDs are no exception. Peculiarities of physical-chemical processes in strongly non-uniform MDs are demonstrated placing high emphasis on the influence of small noble gas additions to the main plasma gas (section 15). The review is illustrated by 80 figures. The list of references contains 350 scientific publications.

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“…However, the generation efficiency of He‐ICP using high‐frequency power has been low thus far . On the other hand, in the case of He‐MIP (helium microwave‐induced plasma), a plasma cannot be generated in the doughnut shape optimal for analysis, and only weak power (below 500 W) can be supplied, which causes a number of problems, such as the impossibility of direct analysis of solution samples at high sensitivity .…”

Section: Introductionmentioning

confidence: 99%

Helium Microwave‐Induced Plasma at Atmospheric Pressure Generated by Okamoto Cavity for Nonmetal Analysis

Okamoto

2014

Elect Comm in Japan

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SUMMARY Helium microwave‐induced plasma (He‐MIP) for nonmetal elements analysis was generated by a 2.45 GHz microwave power (∼1 kW) with the Okamoto cavity of the surface‐wave mode at atmospheric pressure. Effects of the main parameters of the cavity such as the thickness (direction of the electric field) of the cavity, the width of the ring‐slot, and the position of the discharge tube (torch) on the excitation temperature and the analytical signals were investigated. The excitation temperature and the electron density of the plasma as a parameter of the microwave power, and the plasma and carrier gas flow rates were measured. With 600‐W input microwave power, an excitation temperature of 7000 K for the high energy part and an electron density of 2.4×1014/ cm 3 were obtained. An aqueous solution of NaF was introduced into the center of the annular He‐MIP, the F I line (685 nm, 14.5 eV) signal was detected, and the effects of microwave power and the gas flow rates on the signal were studied. A detection limit of 60 ppb for fluorine was obtained.

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Characteristics of a Kilowatt-Plus Helium Microwave-Induced Plasma Utilizing 2- and 3-cm-Depth TM₀₁₀ Resonator Cavities

Cited by 25 publications

References 17 publications

Characteristics of a High-Power Microwave-Induced Helium Plasma at Atmospheric Pressure for the Determination of Nonmetals in Aqueous Solution

Characteristics of a High-Power Microwave-Induced Helium Plasma at Atmospheric Pressure for the Determination of Nonmetals in Aqueous Solution

Microwave discharges at low pressures and peculiarities of the processes in strongly non-uniform plasma

Helium Microwave‐Induced Plasma at Atmospheric Pressure Generated by Okamoto Cavity for Nonmetal Analysis

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Characteristics of a Kilowatt-Plus Helium Microwave-Induced Plasma Utilizing 2- and 3-cm-Depth TM010 Resonator Cavities

Cited by 25 publications

References 17 publications

Characteristics of a High-Power Microwave-Induced Helium Plasma at Atmospheric Pressure for the Determination of Nonmetals in Aqueous Solution

Characteristics of a High-Power Microwave-Induced Helium Plasma at Atmospheric Pressure for the Determination of Nonmetals in Aqueous Solution

Microwave discharges at low pressures and peculiarities of the processes in strongly non-uniform plasma

Helium Microwave‐Induced Plasma at Atmospheric Pressure Generated by Okamoto Cavity for Nonmetal Analysis

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Characteristics of a Kilowatt-Plus Helium Microwave-Induced Plasma Utilizing 2- and 3-cm-Depth TM₀₁₀ Resonator Cavities