Characteristics and Areas of Possible Application of Amorphous Silicon–Carbon and Metal–Silicon–Carbon Films. Review

Dmitriev, V. K.; Il’ichev, E. A.; Kirpilenko, G. G.; Petrukhin, G. N.; Rychkov, G. S.; Frolov, V. D.

doi:10.1134/s1063782623010025

Semiconductors

2023

DOI: 10.1134/s1063782623010025

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Characteristics and Areas of Possible Application of Amorphous Silicon–Carbon and Metal–Silicon–Carbon Films. Review

V. K. Dmitriev,

E. A. Il’ichev,

G. G. Kirpilenko

et al.

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Characteristics and Areas of Possible Application of Amorphous Silicon–Carbon and Metal–Silicon–Carbon Films. Review

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