Characteristics analysis of fused silica material and experimental research on polishing removal efficiency

Abstract

In view of the problem that various fused silica materials have different characteristics, which could cause differences in processability, the mechanical properties of fused silica materials were studied through nanoindentation experiments. Relationship curves between indentation load and material hardness/elastic modulus were obtained for different fused silica optics. The fracture characteristics of fused silica materials were also studied using the gradient force imprinting method, and the fracture toughness and critical load of crack generation were calculated for different fused silica materials. The ability of different fused silica materials to resist crack instability propagation under the same process conditions was also clarified. Furthermore, the polishing removal characteristics of fused silica materials were researched, and the polishing removal efficiency of different materials was obtained through the magnetorheologi cal finishing (MRF) spotting method. It was further verified that the hardness was positively correlated with the material polishing removal efficiency. Based on the characteristics of different fused silica materials, the optical ultra -precision processing parameters could be selected. This is of great significance for low-defect and high-efficiency ultra-precision machining of optics.