Characteristic Variations of Graphene Field-Effect Transistors Induced by CF₄Gas

Seamless fabrication technique for micro to millimeter structures by combining 3D printing and photolithography

“…In the past decades, many micro-electro-mechanical systems (MEMS) devices have been developed [1][2][3][4][5][6][7] because of their many advantages such as miniaturization, power saving, higher functionality, and lower cost. These MEMS devices having structures from sub-micrometer to sub-millimeter are often fabricated by photolithography, [3][4][5][6][7] electron-beam lithography, 2,6,8) and embossing.…”

“…In the past decades, many micro-electro-mechanical systems (MEMS) devices have been developed [1][2][3][4][5][6][7] because of their many advantages such as miniaturization, power saving, higher functionality, and lower cost. These MEMS devices having structures from sub-micrometer to sub-millimeter are often fabricated by photolithography, [3][4][5][6][7] electron-beam lithography, 2,6,8) and embossing. 9,10) Recently, in addition to these fabrication techniques, 3D printing is beginning to be widely used [11][12][13][14][15][16] in the MEMS field to conveniently fabricate prototype devices and complex devices having structures from sub-millimeter to millimeter.…”