2020
DOI: 10.1088/1361-6463/ab7df2
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Characteristic study of decomposing CF4 in a nitrogen microwave plasmas torch at atmospheric pressure

Abstract: A microwave plasma torch operated at atmospheric pressure (APMPT) is used for abating CF4 gas diluted by nitrogen. The variation of destruction and removal efficiency (DRE) of CF4 by measuring Fourier transformation infrared spectra is investigated with respect to the microwave power, CF4 concentration, total gas flow and the length and material of discharge tube in reaction chamber respectively. The partition into annular free-discharge and central plasma regions in the cross section of discharge tube, influe… Show more

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Cited by 6 publications
(6 citation statements)
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“…So, the reaction (18) comes into play when the top of cage is 1.5 cm away from the mounting hole on the waveguide. However, when the distance increases to 7.5 cm, the density of O atom becomes so small that the reaction (18) seemed not as important as the other two paths.…”
Section: Co 2 Conversion In Br Driven By Microwave Plasma Torchmentioning
confidence: 95%
See 1 more Smart Citation
“…So, the reaction (18) comes into play when the top of cage is 1.5 cm away from the mounting hole on the waveguide. However, when the distance increases to 7.5 cm, the density of O atom becomes so small that the reaction (18) seemed not as important as the other two paths.…”
Section: Co 2 Conversion In Br Driven By Microwave Plasma Torchmentioning
confidence: 95%
“…CO 2 . The dissociation temperature of CO 2 is about 3500 K according to thermodynamics estimation, which the microwave plasma torch can reach readily at atmospheric pressure [18][19][20]. However, if there is no rapid quenching, the decomposed products of CO 2 , such as C, O, O 2 , and CO, etc, will recombine with each other to form the CO 2 molecules again, leading to the reduction of the conversion efficiency of CO 2 .…”
Section: Introductionmentioning
confidence: 99%
“…Plasma-based abatement techniques have received significant attention in recent years because the regulations and penalties for carbon emissions are likely to be strengthened [3][4][5][6][7][8][9][10][11][12][13][14][15][16]. As plasma sources consume electricity compared to combustion, which produces CO 2 directly, theoretically, the entire conversion process becomes carbon-neutral when all the electricity needed is supplied from renewable energy sources such as solar and wind power [17,18].…”
Section: Introductionmentioning
confidence: 99%
“…As plasma sources consume electricity compared to combustion, which produces CO 2 directly, theoretically, the entire conversion process becomes carbon-neutral when all the electricity needed is supplied from renewable energy sources such as solar and wind power [17,18]. Various thermal plasmas have been used to decompose VOCs [3][4][5][6][7] and PFCs [8][9][10][11][12][13][14][15][16]. Specifically, for PFC decomposition, direct current (DC) arc plasmas, gliding arc discharges, and microwave plasmas displayed destruction/removal efficiencies (DREs) of 99.6% [9][10][11], 97.5% [12,13], and 98.4% [14][15][16], respectively.…”
Section: Introductionmentioning
confidence: 99%
“…Moreover, since MW plasma is stricken by MW radiation without the use of electrodes, the technical issues caused by the lifetime of the electrode met in chemical applications are completely settled. In addition, as no vacuum system is needed, operation at atmospheric pressure could bring about some merits in industrial applications, such as reducing investment and maintenance costs and avoiding erosion to vacuum systems [23][24][25][26].…”
Section: Introductionmentioning
confidence: 99%