Characteristic nonlinear responses for gas species on the surface of different semiconductor gas sensors

Nakata, Satoshi; Nakasuji, Mie; Ojima, N.; Kitora, Maki

doi:10.1016/s0169-4332(98)00290-6

Cited by 31 publications

(26 citation statements)

References 23 publications

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“…For example, the gas sensitivity of WO films (as for other oxide semiconductor sensors) is based on the adsorption of gas molecules on the surface which determines the variation of the concentration of the oxygen vacancies present at the surface and, therefore, a variation of the number of free carriers, causing a change of the electrical conductivity [16], [17].…”

Section: Introductionmentioning

confidence: 99%

Surface and in depth chemistry of polycrystalline WO/sub 3/ thin films studied by X-ray and soft X-ray photoemission spectroscopies

et al. 2003

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The chemical composition of surface and underneath layers of WO 3 thin films, deposited by thermal evaporation and annealed in air at different temperatures, has been studied by means of soft X-ray and X-ray photoemission spectroscopies. Both the W 4f and valence band spectra have been analyzed. The analysis has been performed on samples as inserted and after an annealing process in an ultra high vacuum. The results have shown that the surface always presents a nonstoichiometric WO 3 compound, whose spectral components do not depend on the sample preparation. Instead, the study of the underneath layers has shown that the WO 3 films annealed in air at 500 C are highly stoichiometric and stable, while the samples heated in air at 300 C are much more sensitive to the vacuum thermal treatment showing the presence of reduced WO phases, whose intensity and chemical states change after the in vacuum annealing procedure.

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Section: Introductionmentioning

confidence: 99%

Surface and in depth chemistry of polycrystalline WO/sub 3/ thin films studied by X-ray and soft X-ray photoemission spectroscopies

et al. 2003

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“…6,[15][16][17]20,21,24 In general, the relationship between the d.c. value of the response (one-dimensional information) and the concentration, R0-C, is used for the calibration curve. As for the present system based on nonlinearity, characteristic calibration curves based on multi-dimensional information (R0-C, R1-C, R2-C, R3-C, …, I1-C, I2-C, I3-C, …) were used to define the concentration of the sample species.…”

Section: Experimental and Analytical Profiles To Detect And Quantify mentioning

confidence: 99%

“…We recently reported that the effect of the range and frequency of temperature modulation is examined 16 and that the nonlinear responses exhibit characteristic changes depending on the gas species and on the composition of the semiconductor 17 to enhance the selectivity. We also reported that the nonlinear dynamic response can be used to determine the concentration of a specific gas, even in the presence of an interfering gas.…”

Section: ·2·2 Recent Work On a Periodic Temperature Changementioning

confidence: 99%

“…To clarify these different competition effects on the nonlinear dynamic responses to the gaseous mixtures, we use the following model for a semiconductor gas sensor: [15][16][17]43,44 S + me -+ 1/2O2 S-Os m-,…”

Section: ·2·3 Sniffing Sensormentioning

confidence: 99%

“…Figure 2 shows a schematic representation of a measurement for detecting and evaluating the nonlinearity of a system. Experimental and analytical profiles are as follows: [6][7][8][9][10][11][12][13][14][15][16][17][18][19][20][21][22][23][24] (1) a sinusoidal perturbation (X: e.g., temperature, voltage, flow rate, or surface area) is applied to the experimental system; (2) the output signal is recorded; and (3) a time trace of the output signal (Y) is Fourier transformed to the frequency domain. The deformation of the output signal from the sinusoidal input corresponds to the nonlinearity of the experimental system, and is quantitatively evaluated as higher harmonics of a Fourier transformation.…”

Section: Introductionmentioning

confidence: 99%

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Chemical Sensor Based on Nonlinearity: Principle and Application

2001

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Novel chemical sensors based on a time-dependent nonlinear response are reviewed. The strategy is to artificially mimic information transduction in living organisms. In taste and olfaction, information of chemical structure and concentration is transformed into nervous impulses in the nervous cell, i.e., time-dependent multi-dimensional information. Because the excitation and pulse generation in the nervous cell are typically nonlinear phenomena, it may be worthwhile to utilize the nonlinearity as the multi-dimensional information for molecular recognition. The principle of a "nonlinear" sensor is that a sinusoidal modulation is applied to a system, and the output signal is analyzed. The output signal of the sensor is characteristically deformed from the sinusoidal input depending on the chemical structure and concentration of the chemical stimuli. The characteristic nonlinear responses to chemical stimuli are discussed in relation to the kinetics of chemical compounds on the sensor surface. As a practical application, we introduced electrochemical sensors based on the differential capacitance, semiconductor gas sensors under the application of sinusoidal temperature or diffusion change, and a chemical sensor based on the spatio-temporal information. We demonstrated that mutli-dimensional information based on nonlinearity can provide quite useful information for the analysis of chemical species, even in the presence of another analyte or an interference with a single detector.

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How to Improve the Performance of Porous Silicon‐Based Gas and Vapor Sensors? Approaches and Achievements

Rusu

2019

Physica Status Solidi (a)

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It is shown that, along with the advantages, sensors based on porous silicon (PSi) have disadvantages that inhibit their widespread use. The parameters of PSi which can affect the performance of PSi-based sensors are considered in detail, and approaches are analyzed that allow for the improvement of the main characteristics of PSi-based gas and vapor sensors. It is concluded that despite the progress made in terms of improving the sensitivity, selectivity, and stability of PSi-based sensors, further research and development in this direction is necessary, as the existing methods do not provide the required stability of the characteristics and selectivity of their response.

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Characteristic nonlinear responses for gas species on the surface of different semiconductor gas sensors

Cited by 31 publications

References 23 publications

Surface and in depth chemistry of polycrystalline WO/sub 3/ thin films studied by X-ray and soft X-ray photoemission spectroscopies

Surface and in depth chemistry of polycrystalline WO/sub 3/ thin films studied by X-ray and soft X-ray photoemission spectroscopies

Chemical Sensor Based on Nonlinearity: Principle and Application

How to Improve the Performance of Porous Silicon‐Based Gas and Vapor Sensors? Approaches and Achievements

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