2023
DOI: 10.3390/coatings13030541
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Characterisations of La-Sr-Mn-O (LSMO) Thin Film Fabricated by RF Sputtering

Abstract: A revisited study of perovskite-based manganite La0.67Sr0.33MnO3 (LSMO) deposited onto corning-glass (CG) substrates is reported here. The LSMO films were fabricated with RF sputtering with different deposition times, varying from 60 to 180 min, resulting in films with thicknesses of 35.0–109.7 nm. Rietveld refinements of the XRD spectrum showed that the samples exhibited hexagonal structures with a space group of R-3c (167) and remained unmodified structures. Clusters of monolayer growth were observed from th… Show more

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