Characterisation of thin boron-doped diamond films using Raman spectroscopy and chemometrics

Abstract

A non-destructive chemometric method to determine thickness and boron concentration of as-deposited, thin, heavily doped diamond films by Raman microscopy.

Diamonds in the Rough: Direct Surface Enhanced Infrared Spectroscopic Evidence of Nitrogen Reduction on Boron-Doped Diamond Supported Metal Catalysts

“…The Raman spectrum of the BDD film on Si exhibits two prominent modes at ∼520 and 970 cm −1 assigned to phonon modes of the supporting Si substrate. 40 These peaks are observed because the diamond film is thin and is rather transparent to the 514 nm excitation laser. The less intense but sharp peak centered at 1327 cm −1 and the broad shoulder at 1228 cm −1 correspond to a phonon mode from the sp 3 carbon (diamond) lattice and the B−C vibration, respectively.…”

“…The BDD film was further characterized by Raman spectroscopy (Figure c). The Raman spectrum of the BDD film on Si exhibits two prominent modes at ∼520 and 970 cm –1 assigned to phonon modes of the supporting Si substrate . These peaks are observed because the diamond film is thin and is rather transparent to the 514 nm excitation laser.…”