Abstract:Hybrid pixel sensors, originally developed for particle physics, incorporate advanced analogue processing and digital conversion circuitry at the individual pixel level. Medipix3 [1] is an example of such a sensor and we have investigated its performance as an imaging detector for transmission electron microscopy (TEM). Measurements were performed with electron beam energies in the range, 60–200 keV on a JEOLARM200cF TEM/STEM [2] utilising a 256x256 pixel Medipix3 detector with 300 µm thick Si sensor layer.
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