2002
DOI: 10.1016/s0257-8972(01)01448-7
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Characterisation and performance of partially filtered arc TiAlN coatings

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Cited by 66 publications
(39 citation statements)
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“…3, it can be also shown that no diffusive halo appears in the SAED patterns in addition to some clear-cut diffraction rings, implying that there is no amorphous phase such as CN x in the WC x N y films which accords well with the DOS and XPS results. The similar trend has also been widely observed in other sputtered films [46], which can be due to the enhancement of particle bombardment induced by increasing V b . This particle bombardment has been likened to a shot peening process which generates higher defect concentrations [47] with increasing shot intensity and thus leads to an increase in intrinsic stress.…”
Section: Composition and Microstructuresupporting
confidence: 86%
“…3, it can be also shown that no diffusive halo appears in the SAED patterns in addition to some clear-cut diffraction rings, implying that there is no amorphous phase such as CN x in the WC x N y films which accords well with the DOS and XPS results. The similar trend has also been widely observed in other sputtered films [46], which can be due to the enhancement of particle bombardment induced by increasing V b . This particle bombardment has been likened to a shot peening process which generates higher defect concentrations [47] with increasing shot intensity and thus leads to an increase in intrinsic stress.…”
Section: Composition and Microstructuresupporting
confidence: 86%
“…Furthermore, an increase in compressive stresses with increasing bias voltage could hinder the growth of the less dense hcp phase, compared to the denser fcc phase [16]. Such an increase in residual compressive stress with increasing bias voltage has been reported by various authors [11,17,18]. A correlation between residual stresses and the presence of hcp phase has also been published by Zhou et al [19].…”
Section: Microstructurementioning
confidence: 67%
“…Ion current densities at the substrates (J s ) during the pretreatment were recorded in the Hauzer HTC1000-4 machine with a flat probe. Instruments] such as low angle Bragg-Brentano technique (2θ, 1°-10°) was used for bi-layer period measurement whereas glancing angle technique (2, 2θ, 20-100°) was used for stress analysis [12]. Surface morphology was studied by scanning electron microscopy (NOVANanoSEM).…”
Section: Characterisationmentioning
confidence: 99%