Abstract:ULTRA-SMOOTH SURFACES HAVE BEEN WIDELY used in many areas, e.g., large scale integration (LSI), computer hard disk driver (HDD), optic lenses, connectors of optic fibers, and so on. These surfaces should be of very low roughness and waviness, very high flatness, and very few defects. In order to achieve these requirements, many kinds of planarization techniques have been developed in the past 15 years, e.g., ultra-fine diamond (UFD) powder polishing [1] which has been used in the manufacturing of magnetic head… Show more
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