Channeled spectroscopic ellipsometry enabled by physics-informed tandem untrained neural networks

Yang, Shilong; Chen, Xiuguo; Chen, Wenlong; Hu, Jing; Wang, Yifu; Liu, Shuo; Liu, Shiyuan

doi:10.1016/j.measurement.2024.114940

Measurement

2024

DOI: 10.1016/j.measurement.2024.114940

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Channeled spectroscopic ellipsometry enabled by physics-informed tandem untrained neural networks

Shilong Yang,

Xiuguo Chen,

Wenlong Chen

et al.

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Channeled spectroscopic ellipsometry enabled by physics-informed tandem untrained neural networks

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References 46 publications

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