2020
DOI: 10.5573/jsts.2020.20.5.474
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Channel Defect Analysis Method of a-IGZO TFTs on Polyimide for Flexible Displays

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Cited by 5 publications
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“…For bending experiments, TFT backplane on polyimide (PI) substrate was laminated on protective film (adhesive-coated polymer film) or sandwiched between two protective, which can establish the neutral plane close to TFT layer. 13 To evaluate mechanical durability of a flexible LTPS TFT backplane, a cyclic bending test was also performed at a bending radius (R). When a TFT on PI substrate is bent, stress is distributed inside TFT backplane.…”
Section: Methodsmentioning
confidence: 99%
“…For bending experiments, TFT backplane on polyimide (PI) substrate was laminated on protective film (adhesive-coated polymer film) or sandwiched between two protective, which can establish the neutral plane close to TFT layer. 13 To evaluate mechanical durability of a flexible LTPS TFT backplane, a cyclic bending test was also performed at a bending radius (R). When a TFT on PI substrate is bent, stress is distributed inside TFT backplane.…”
Section: Methodsmentioning
confidence: 99%
“…Since the glass transition temperature of PI is less than 500 °C, a low-temperature process is essential to the fabrication of PI-substrate-based TFTs 7 . As such, low-temperature polycrystalline silicon (LTPS) TFTs with good mobility or amorphous indium gallium zinc oxide (a-IGZO) TFTs with a good on/off ratio are used 8 11 . However, the occurrence of specific threshold voltage (V th ) behavior during the reliability evaluation of TFTs fabricated on PI substrates was recently reported 12 , 13 .…”
Section: Introductionmentioning
confidence: 99%