Changing of Defect’s Structure and Properties of Superhard Nanostructured Ti-Si-N Coatings, Fabricated Using CPVD, before and after Annealing

Abstract

Using such unique methods of analysis as slow positron beam (SPB), RBS, µ-PIXE (proton microbeam), XRD, SEM with EDS, XPS, nanohardness and elastic modulus measurements, we studied superhard nanostructure Ti-Si-N coatings, which were deposited using Cathodic-PVD method, before and after annealing at the temperature of 600˚C for 30 minutes. It is shown in the paper that redistribution of N and Si occurs on the borders of nanograins after annealing, amorphous phase α-SiN x (Si 3 N 4 ) is created, defects segregates on interfaces and forms vacancy-type clusters with rather high concentration from 5 × 10 16 cm −3 to 7.5 × 10 17 cm −3 due to thermodiffusion. Solid solution (Ti,Si)N and small concentration of α-SiN (close to XRD detection limits) are formed in the coating. Also it was obtained, that deflected mode is formed in the coating (compressive deformation equals to -2.6%), but after thermal annealing deformation reduces to a value of −2.3%. Size of nanograins of solid solution (Ti, Si)N increases from 12.5 nm to (13.2 -13.4) nm. 25 nm size grains increase their size to 28.5 nm after annealing (under another deposition regime).

Cathodic Vacuum ARC Multilayer Coatings (TiZrSiY)N/NbN: Structure and Properties Depending on The Deposition Interval of Alternate Layers

“…This is consistent with the Hall-Petch relation, from which it follows that reducing the grain size to a certain critical value leads to an increase in the hardness and strength of the nitride compound [4]. At silicon concentrations of 6-8 at.%, the TiZrN coating has a nanocomposite structure characterised by the formation of an amorphous tissue Si3N4 [5][6][7][8]. Coatings with…”

Improvement of the tribological performance in corrosive environment of CoCr alloy by TiSiON coatings

“…In this way, the metallic components covered with ceramic coatings can provide both the inertness of ceramics and the tensile strength of metallic alloys, minimizing the release of heavy metal ions and wear particles. Ceramic coatings, such as titanium oxides (TiO 2 [5]), titanium and silicon nitrides (TiN [6,7], SiN [8], TiSiN [9,10]), and titanium oxynitrides (TiON [6]) proved good biocompatibility and biomechanical properties, being proper for load bearing applications, such as knee and hip joints. Moreover, previous studies demonstrated that the addition of some amount of Si into the nitrides could improve their mechanical and tribological characteristics [11,12].…”

Composition, structure and tribotechnical properties of TiN, MoN single-layer and TiN/MoN multilayer coatings

“…All the above methods of the treatment and deposition of protective coatings have their advan tages and disadvantages, as it follows from the analysis of publications [10][11][12][13][14]. One of the promising lines in producing protective coatings is the deposition from plasma obtained by vacuum-arc cathodic evaporation [4,[15][16][17][18][19][20].…”