Microsc Microanal
 2008
DOI: 10.1017/s1431927608082421
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Challenging Analysis for the Gate Stack and Strained Channel of the Advanced CMOS

Guoda Lian
1
,
C. B. Vartuli
2
,
Jaehak Chung
3

Abstract: Extended abstract of a paper presented at Microscopy and Microanalysis 2008 in Albuquerque, New Mexico, USA, August 3 – August 7, 2008

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