Challenges of grazing emission X-ray fluorescence (GEXRF) for the characterization of advanced nanostructured surfaces

Abstract

We are investigating the potential of the grazing emission X-ray fluorescence (GEXRF) technique to determine the spatial distribution of different chemical elements in periodic nanostructures.

2023 atomic spectrometry update – a review of advances in X-ray fluorescence spectrometry and its special applications

“…Using a laser-produced plasma source, the intensity profile of the O Kα spectral line over the exit angle had the same trend but was several times noisier. A similar scan-free approach was applied by Skroblin et al 63 who compared GE-XRF spectrometry and GI-SAXS for the characterisation of periodic TiO 2 nanostructures fabricated by a self-aligned double-patterning process. Both the angle-resolved fluorescence and the scattering intensities were calculated by modelling the X-ray standing-wave-field both close to and within the nanostructures.…”