Challenges in the application of hybrid reluctance actuators in scanning positioning stages in vacuum with nanometer accuracy and mGauss magnetic stray field

High Precision Hybrid Reluctance Actuator With Integrated Orientation Independent Zero Power Gravity Compensation

“…Compared to voice coil actuators, hybrid reluctance actuators (HRAs) provide higher force-to-volume ratios [12], which enable more compact actuator designs. Due to several challenges, such as the nonlinear force-to-current relation, they have hardly been implemented in high precision positioning and scanning systems in the past [13], [14]. Nevertheless, several reluctance actuated systems have been developed, including fast tool servos [15], fast steering mirrors [16], [17], and nanopositioners [18].…”