CFD simulation of laser enhanced modified chemical vapor deposition process

Hafiz, O.K. Mohammed; Singh, Anugrah

doi:10.1016/j.cherd.2010.09.005

Cited by 7 publications

(4 citation statements)

References 21 publications

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“…The calculated dimensionless thermophoretic force acting on the inner cylinder is 0.420 97k 3 , which is 0.01% smaller than the analytical value 0.421 00k 3 .…”

Section: Asymptotic Theorymentioning

confidence: 82%

“…The global Kn is defined based on the bottom gap g. The magnitude of the force is 0.6603k 3 and its direction points downwards, that is, towards the narrow gap. As a comparison, a topographically equivalent system consisting of two noncoaxial circular cylinders with the same temperature conditions is considered, and the calculated Knudsen force acting on the inner cylinder has a magnitude of 0.4209k 3 , but points upwards. The opposite force directions in the two systems can be understood by examining the temperature contours, flow structures, and pressure variations plotted in Fig.…”

Section: B Heated Microbeammentioning

confidence: 99%

“…The resulting phenomenon, that is, thermophoresis, is the driving force behind many successful practical applications, particularly in the field of aerosol [2,3]. The fundamental mechanism of thermophoresis has been extensively researched [4][5][6][7][8].…”

Section: Introductionmentioning

confidence: 99%

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Shape-dependent orientation of thermophoretic forces in microsystems

Liang

2013

Phys. Rev. E

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It is generally acknowledged that the direction of the thermophoretic force acting on microparticles is largely determined by the imposed temperature gradient, and the shape of the microparticle has little influence on its direction. We show that one type of thermophoretic force, emerged due to the advent of microfabrication techniques, is highly sensitive to object shape, and it is feasible to tune force orientation via proper shape design. We reveal the underlying mechanism by an asymptotic analysis of the Boltzmann equation and point out the reason why the classical thermophoretic force is insensitive to the particle shape, but the force in microsystems is. The discovered phenomenon could find its applications in methods for microparticle manipulation and separation.

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“…The calculated dimensionless thermophoretic force acting on the inner cylinder is 0.420 97k 3 , which is 0.01% smaller than the analytical value 0.421 00k 3 .…”

Section: Asymptotic Theorymentioning

confidence: 82%

Section: B Heated Microbeammentioning

confidence: 99%

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Shape-dependent orientation of thermophoretic forces in microsystems

Liang

2013

Phys. Rev. E

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“…A process-condition-material relationship is necessary to be developed with the help of computational simulations [16,17]. Most simulations related to the laser applications use macroscopic methods such as FVM and FEM [18][19][20][21]. The multi-physics problems could be simulated with good predictions; however, the microstructure of deposited materials is usually difficult to capture.…”

Section: Introductionmentioning

confidence: 99%

Simulation of the Nucleation and Crystal Growth Process in the Laser-Induced Deposition in Solution by a Lattice Boltzmann Method

Liu

2022

Nanomaterials

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A Lattice Boltzmann model is proposed, combining the theories of nucleation and crystal growth for the study of the laser-induced deposition in solution (LIDS). The conjugate heat transfer and the natural convection of the liquid precursor were simulated with the evolving interface of crystal growth. In turn, the morphology of the deposited materials was affected by multiple process parameters, including conditions of chemical precursor and the laser-induced heat and mass transfer. Simulation results indicated that the morphology of deposited materials was mostly affected by the initial concentration of the precursor solution. Specifically, the nonuniformity of thin films was caused by the convection induced by the pulsed-laser, and the surface roughness was due to the competition of local structures for the precursor supply. A relationship of process-condition-material was established, providing guidance of choosing various parameters in LIDS for a desirable morphology of deposited material, facilitating the capabilities of pulsed lasers in precise control in nanomanufacturing.

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