The continuously
decreasing size of device features in microelectronics
draws growing attention to the structuring of silicon at the molecular
level with powerful tools provided by synthetic chemistry. Silicon
clusters are of particular importance in this regard not only as potential
precursors for silicon deposition but also as well-defined model systems
for bulk and surfaces of silicon at the nanoscale as well as possible
starting points for future construction of molecularly precise device
structures. This review aims to give a comprehensive overview about
the state of the art in the synthesis of molecular silicon clusters,
which are grouped into (1) electron-precise saturated clusters, (2)
soluble polyhedral Zintl anions, and (3) unsaturated silicon clusters,
the so-called siliconoids. Particular attention is paid to functionalization
as it is generally considered a necessary prerequisite for the design
and construction of more extended systems. The interrelations between
the three different classes of molecular silicon clusters, e.g., arising
from the introduction of negatively charged functional groups, are
highlighted on grounds of NMR properties and computed electronic structures.