Cellular shape micromachined actuator ribbons

Abbasalipour, Amin; Palit, Prithviraj; Sheikhlari, Sepehr; Pakdelian, Siavash; Pourkamali, Siavash

doi:10.1038/s41378-022-00421-y

Cited by 6 publications

(3 citation statements)

References 51 publications

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“…The Cellular electrostatic array actuators that have been reported in this work offer unprecedented scalability and design flexibility as a micromachined electrostatic actuator and it can also provide high output force and displacement. Such actuators were previously implemented in form of out-of-plane bending actuator ribbons with displacement in the hundreds of microns range [5,6]. This work shows a similar actuator ribbon designed for in-plane.…”

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confidence: 88%

“…III.FABRICATION Similar to the previously demonstrated bending (out-ofplane) cellular electrostatic array actuators [5,6], a modified version of the high aspect-ratio polysilicon and silicon (HARPSS) fabrication process was used to fabricate the actuator ribbons. In summary, the silicon network is carved out of the silicon device layer of the SOI substrate followed by deposition of the silicon nitride, silicon dioxide, and polysilicon LPCVD films forming the insulating layer, sacrificial layer (forming the airgaps upon removal), and polysilicon electrodes, respectively.…”

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confidence: 99%

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High Energy Density Cellular Electrostatic In-Plane 2-Axis Actuators

Palit

Abbasalipour

Sheikhlari

et al. 2023

J. Microelectromech. Syst.

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This work reports a class of silicon micromachined millimeter scale electrostatic actuator capable of both axial and lateral in-plane displacement with a relatively high energy density. The actuator is comprised of a large-scale integrated array of individual parallel-plate electrostatic cells. The force and displacement of cells within the array add up providing relatively large actuation force and displacement output for the actuators. The nonconventional fabrication process allows realization of submicron transduction airgaps within the actuator cells lowering the actuation voltage. The fabrication process also allows electrical isolation of different cells within the array so that different sections of the actuator ribbon can be actuated independently enabling lateral deformation of the actuator ribbon in addition to axial contraction. Axial inplane displacement of up to 20.50 µm has been shown for a 2010 µm × 1000 µm fabricated actuator. The actuator output force is as high as 10.3 mN demonstrating maximum energy density of 1.11 mJ/cm 3. The same actuator ribbon demonstrated lateral displacement of 10.11 um.

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confidence: 88%

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confidence: 99%

High Energy Density Cellular Electrostatic In-Plane 2-Axis Actuators

Palit

Abbasalipour

Sheikhlari

et al. 2023

J. Microelectromech. Syst.

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“…Piezoelectric actuators are one kind of driving forcegeneration element, which converts electrical energy into force, displacement, rotation, or submicron motions with high accuracy via the inverse piezoelectric effect. [1][2][3] They are of great attention in different research fields, such as nano-positioning and micromanipulation in semiconductors, optic lens systems, and active vibration controls. 4,5 Piezoelectric ceramics are widely used due to their large piezoelectric coefficient and appropriate thermal stability.…”

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confidence: 99%

Coaxially oriented PVDF/MWCNT nanofibers as a high‐performance piezoelectric actuator

Sharafkhani,

Kokabi

2023

Polymer Composites

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Controlling the orientation of the carbon nanotubes inside a polymer matrix essentially improves their reinforcement effect even at small loading levels, which is attractive from the processing point of view. We inform the utilization of electrospinning to produce highly aligned small‐diameter polyvinylidene fluoride (PVDF) nanofibers where the multiwalled carbon nanotube (MWCNT) are coaxially aligned inside the PVDF nanofibers. The coaxially aligned MWCNTs arrange large numbers of contact sites with the polymer chains, thereby providing enhanced interfacial interactions, resulting in the superior effect of the MWCNTs on the crystalline structure and actuator response of the PVDF at low loading levels (0.06 wt.%). An effective α‐ to β‐phase conversion occurred through the synergistic effects of the electrospinning and MWCNTs, the β‐phase content reached 94%. Also, the degree of crystallinity increased up to 50% respecting the pure nanofibers. The bending actuation of the nanofibers was analyzed as the active layer of soft piezoelectric actuators in a unimorph configuration. The well‐aligned nanofibers showed better actuator deflection than the randomly oriented nanofibers. Comparing the PVDF nanofiber‐based actuators in the literature, our actuators exhibited excellent piezoelectric performance with high potential for practical applications.Highlights Highly aligned small‐diameter PVDF/CNT nanofibers produced by electrospinning. Axially aligned CNTs induce a great piezoelectric effect at low‐loading levels. The F(β) was 94%, and the crystallinity increased by 50% at only 0.06 wt% CNTs. Well‐aligned nanofibers showed better actuator response than the random ones. The soft actuators showed a higher performance than those in the literature.

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A Fast and Strong Microactuator Powered by Internal Combustion of Hydrogen and Oxygen

Uvarov,

Shlepakov,

Svetovoy

2024

Adv Materials Technologies

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The development of fast and strong microactuators that can be integrated in microdevices is an essential challenge due to a lack of appropriate driving principles. A membrane actuator powered by internal combustion of hydrogen and oxygen in a chamber with a volume of 3.1 nanoliters is demonstrated. The combustion in such a small volume is possible only for an extremely high surface‐to‐volume ratio on the order of 107 m−1. The fuel with this ratio is prepared electrochemically in a special regime that produces only nanobubbles. A cloud of nanobubbles merges, forming a microbubble, which explodes, increasing the volume 500× in 10 µs. The actuator generates an instantaneous force up to 0.5 N and is able to move bodies 11 000× more massive than itself. The natural response time of ≈10 ms is defined by the incubation time needed to produce an exploding bubble. The device demonstrates reliable cyclic actuation at a frequency of 1 Hz restricted by the effect of electrolyte aging. After 40 000 explosions, no significant wear in the chamber is observed. Due to a record‐breaking acceleration and standard microfabrication techniques, the actuator can be used as a universal engine for various microdevices including microelectromechanical systems, microfluidics, microrobotics, wearable and implantable devices.

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Cellular shape micromachined actuator ribbons

Cited by 6 publications

References 51 publications

High Energy Density Cellular Electrostatic In-Plane 2-Axis Actuators

High Energy Density Cellular Electrostatic In-Plane 2-Axis Actuators

Coaxially oriented PVDF/MWCNT nanofibers as a high‐performance piezoelectric actuator

A Fast and Strong Microactuator Powered by Internal Combustion of Hydrogen and Oxygen

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