Low Temperature Cofired Ceramic (LTCC) has proven to be an enabling medium for microsystem technologies, because of its desirable electrical, physical, and chemical properties coupled with its capability for rapid prototyping and scalable manufacturing of components. LTCC is viewed as an extension of hybrid microcircuits, and in that function it enables development, testing, and deployment of silicon microsystems. However, its versatility has allowed it to succeed as a microsystem medium in its own right, with applications in non-microelectronic meso-scale devices and in a range of sensor devices. Applications include silicon microfluidic 'chip-and-wire' systems and fluid grid array (FGA)/microfluidic multichip modules using embedded channels in LTCC, and cofired electro-mechanical systems with moving parts. Both the microfluidic and mechanical system applications are enabled by sacrificial volume materials (SVM), which serve to create and maintain cavities and separation gaps during the lamination and cofiring process. SVMs consisting of thermally fugitive or partially inert materials are easily incorporated. Recognizing the premium on devices that are cofired rather than assembled, we report on functional-as-released and functional-as-fired moving parts. Additional applications for cofired transparent windows, some as small as an optical fiber, are also described. The applications described help pave the way for widespread application of LTCC to biomedical, control, analysis, characterization, and radio frequency (RF) functions for macro-meso-microsystems.
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Executive SummaryUpon the recognition that LTCC technology can play an important part in integration of macro-, meso-, micro-, and nano-scale systems, several areas have been investigated. These include new sacrificial volume materials/methods (SVM), new structures, creative use of thermistors, and setter and jacketed setter materials to fabricate structures never before envisioned. These include moving parts that are self-assembling at the mesoscale. These parts have been actuated electrostatically, pneumatically, and directly mechanically.
6March 2007 In a sense, almost every use of solid SVM is crying out for a patterned definition. Many more ways to do this exist when the SVM is in the form of a fluid. SVMs have no real minimum thickness with respect to the scale of features envisioned for thick films. We have also investigated the upper end of features, successfully fabricating channels and volumes with mm scale dimensions. By using composite SVMs, there is essentially no limit.We have fabricated stacked parts in the form of washers of diameter approximately 1.2 cm. Evaluations have been performed on similar parts that are inches in diameter.The application of sensitive materials has made it possible to fabricate smart channels. The bulk of this work has been carried out with polymeric chemiresistors, but new promise is held for cofirable sensitive materials as well. The two that were examined in detail include thermoresistive and piezor...