Abstract:Cationic graft polymerization lithography is a variation of top surface imaging schemes. This technique uses a spincoated, inert polymer film as a photoacid generator carrier. UV exposure is used to generate acid in the top surface of the film. A vapor-phase reaction between the generated acid and a silicon-containing monomer occurs in the exposed areas. The silicon-containing polymer formed, or grafted, on the surface is used as an oxygen etch mask for subsequent pattern transfer through the underlying film. … Show more
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