Cat-CVD SiN passivation films for OLEDs and packaging

Using hot wire and initiated chemical vapor deposition for gas barrier thin film encapsulation

“…It can be deposited by HWCVD using SiH 4 and NH 3 as precursor gasses. Heya et al [10] used a HWCVD roll-to-roll setup to coat a PET foil with SiN x at substrate temperatures between 20 and 100°C, obtaining a WVTR of 0.01 g/m 2 /day for a 40 nm layer. To check its reliability over time, this barrier was applied to an OLED, which is shown in Fig.…”

Effect of DC bias on microstructural rearrangement of a-SiN:H films on PET substrate

“…This is due to a-SiN:H has a promising optical, electrical properties and chemical inertness against moisture and oxygen [3,4]. It is our common experience that the films deposited at low temperature show relatively larger band tail width, low adhesion to substrate, high porosity and large numbers of deep defect states in the mid gap states [5].…”

“…In particular, it occurs in the case of flexible polyethylene terephthalate (PET) substrate with the relatively high linear expansion coefficient, low glass transition temperature (T g < 300 8C), high optical transparency, and good chemical resistance and barrier properties. These issues become critical for use in the organic (OLED) display technology [3,4] and these backgrounds have motivated the present research. There have been many reports on the deposition of a-SiN:H films on the PET substrate by hot-wire chemical vapor deposition (HWCVD) with a gas mixture of silane (SiH 4 ) and ammonia (NH 3 ) [3,6].…”

“…These issues become critical for use in the organic (OLED) display technology [3,4] and these backgrounds have motivated the present research. There have been many reports on the deposition of a-SiN:H films on the PET substrate by hot-wire chemical vapor deposition (HWCVD) with a gas mixture of silane (SiH 4 ) and ammonia (NH 3 ) [3,6]. Wuu et al observed that the NH 3 /SiH 4 flow ratio played an important role in a-SiN:H films such as bonding configuration, transmittance, refractive index, deposition rate, adhesion, WVTR and OTR on the polyethylene terephthalate (PET) [4,6].…”

“…For sake of better understanding, the region 500-1270 cm À1 can be deconvoluted into five individual peaks. The vibrational peaks(1)(2)(3)(4)(5) are centered at 658.8, 762.3, 928.4, 1007.6, and 1185.9 cm À1 correspond to Si-H wagging, TO Si-N stretching or Si-H 2 scissors, Si-H 2 rocking or LO-Si-N stretching and N-H bending or Si-O stretching, respectively[8][9][10][11]. The vibrational peaks(6)(7)(8) are centered at 2082.2, 2262.7 and 2134.6 cm À1 corresponds to Si-H stretching, Si-H 2 stretching, Si-H 3 stretching, respectably[10,11].…”