2007
DOI: 10.1002/sca.20000
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CASINO V2.42—A Fast and Easy‐to‐use Modeling Tool for Scanning Electron Microscopy and Microanalysis Users

Abstract: Summary: Monte Carlo simulations have been widely used by microscopists for the last few decades. In the beginning it was a tedious and slow process, requiring a high level of computer skills from users and long computational times. Recent progress in the microelectronics industry now provides researchers with affordable desktop computers with clock rates greater than 3 GHz. With this type of computing power routinely available, Monte Carlo simulation is no longer an exclusive or long (overnight) process. The … Show more

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Cited by 1,305 publications
(908 citation statements)
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“…It results, in ZnO, in a generation volume of about 100 nm (with 90% power in this region, as supported by Monte Carlo simulation). 39 The CL spectra were carefully collected step by step along the radial direction across the diameter of the ZnO microwires from the inner side to the outer side by CL spectroscopy (Gatan monocle 3þ) at liquid helium temperature (8 K). The CL spectra were recorded by a CCD (charge coupled device) with a scanning range of 300 to 450 nm with a spectral resolution of about 0.5 nm.…”
Section: Methodsmentioning
confidence: 99%
“…It results, in ZnO, in a generation volume of about 100 nm (with 90% power in this region, as supported by Monte Carlo simulation). 39 The CL spectra were carefully collected step by step along the radial direction across the diameter of the ZnO microwires from the inner side to the outer side by CL spectroscopy (Gatan monocle 3þ) at liquid helium temperature (8 K). The CL spectra were recorded by a CCD (charge coupled device) with a scanning range of 300 to 450 nm with a spectral resolution of about 0.5 nm.…”
Section: Methodsmentioning
confidence: 99%
“…Electron and helium ion trajectory plots were generated using the Monte Carlo simulation packages CASINO (Drouin et al, 2007) and SRIM (Zeigler et al, 1985;Biersack & Haggmark, 1980), respectively, to examine the different interaction volumes associated with CL and IL generation ( Figure 3). A visual comparison of the two plots in Figure 3 reveals that the interaction volume of a 20 keV electron beam in GaN is roughly 200-250 times that of the 30 keV helium ion beam.…”
Section: Direct Bad Gap Semiconductorsmentioning
confidence: 99%
“…Because the spatial frequency spectrum of a recorded image is a function of the beam diameter, a mathematical algorithm can be used to extract the beam diameter from an SEM image of the test pattern (Babin et al, 2006). Monte Carlo simulations using the Casino 2.42 software (Hovington et al, 1997;Drouin et al, 2007) were then performed to determine the size and shape of the X-ray emission volume within the brass target. Input parameters included a target composition of 67 wt.% Cu and 33 wt.% Zn, a number of incoming primary electrons of 50,000, and the electron probe diameter measured using the Beametr v1 test sample.…”
Section: Sem Imaging Edx Analysis and Resolution Testmentioning
confidence: 99%