2013
DOI: 10.1016/j.ieri.2013.11.029
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Cascade Quality Prediction Method Using Multiple PCA+ID3 for Multi-Stage Manufacturing System

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Cited by 23 publications
(6 citation statements)
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“…The dataset provided by UCI Machine Learning Repository (http://archive.ics.uci.edu/mL) is related to a semiconductor manufacturing process. The dataset consists of 1567 observations, and each observation is made up of 591 features representing manufacturing operations of a single semiconductor [56]. The data were collected from the continuous monitoring process using sensors and metrology equipment along the semiconductor manufacturing line.…”
Section: Steel Plates Faults Datasetmentioning
confidence: 99%
“…The dataset provided by UCI Machine Learning Repository (http://archive.ics.uci.edu/mL) is related to a semiconductor manufacturing process. The dataset consists of 1567 observations, and each observation is made up of 591 features representing manufacturing operations of a single semiconductor [56]. The data were collected from the continuous monitoring process using sensors and metrology equipment along the semiconductor manufacturing line.…”
Section: Steel Plates Faults Datasetmentioning
confidence: 99%
“…There are many advantages [32] to classify a mass of data by using the ID3 algorithm, such as strong intuitive nature, easy decomposability and so on, but the ID3 algorithm also has some disadvantages, for example: (1) When using the information gain as attribute selection method, ID3 tends to choose the attribute that has more values [33] because the value of the information gain equation of this type of attribution will be larger than that of others. (2) As is known to all, if the logarithmic expression and the four arithmetic operations are the two equivalent expressions of one function, the running time of the four arithmetic operations is faster than that of the logarithmic expression [34].…”
Section: Algorithm 1: Id3 Algorithmmentioning
confidence: 99%
“…Beside single-point and multi-point, different approach is proposed by [24]. They proposed a cascade approach to develop quality prediction model for MMS.…”
Section: Related Workmentioning
confidence: 99%
“…This method is design based on the variable relationships in MMS. Reference [24] explained the condition of variable relationships in MMS as follows:…”
Section: Related Workmentioning
confidence: 99%
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