Antireflective (AR) surface texturing is a feasible way
to boost
the light absorption of photosensitive materials and devices. As a
plasma-free etching method, metal-assisted chemical etching (MacEtch)
has been employed for fabricating GaN AR surface texturing. However,
the poor etching efficiency of typical MacEtch hinders the demonstration
of highly responsive photodetectors on an undoped GaN wafer. In addition,
GaN MacEtch requires metal mask patterning by lithography, which leads
to a huge processing complexity when the dimension of GaN AR nanostructure
scales down to the submicron range. In this work, we have developed
a facile texturing method of forming a GaN nanoridge surface on an
undoped GaN thin film by a lithography-free submicron mask-patterning
process via thermal dewetting of platinum. The nanoridge surface texturing
effectively reduces the surface reflection in the ultraviolet (UV)
regime, which can be translated to a 6-fold enhancement in responsivity
(i.e., 115 A/W) of the photodiode at 365 nm. The results demonstrated
in this work show that MacEtch can offer a viable route for enhanced
UV light-matter interaction and surface engineering in GaN UV optoelectronic
devices.