Carbon nanotubes synthesized by biased thermal chemical vapor deposition as an electron source in an x-ray tube

Zhang, Y. B.; Lau, Shu Ping; Huang, Lei; Tanemura, Masaki

doi:10.1063/1.1891299

Cited by 35 publications

(25 citation statements)

References 11 publications

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“…For the quantitative estimation of the emission current fluctuations, we used the value of relative fluctuation of current δI rel that is equal to the ratio of the standard current deviation SD to the average current I av δI rel = SD/I av (2) To determine the value of SD, experimental I(t) characteristics were analyzed by the linear regression method. This analysis was fulfilled with the help of the computer program "Origin v.…”

Section: Emission Characteristics Of the X-ray Tube Field Electron Emmentioning

confidence: 99%

“…The usage of such emitters operating almost at the room temperature in various vacuum electron devices instead of thermoionic emitters that need substantial heating will allow to simplify the construction of these devices, to diminish their dimensions, to decrease the power consumption and the switch on time. Among various vacuum electron devices in which the use of field electron emitters is possible, flat panel displays, high power microwave devices and X-ray tubes (2,3) are of the utmost interest. The main problem encountered at the elaboration of the X-ray tubes with field electron emitters is to develop field electron emitters that are characterized by stable dc emission in technical vacuum environment.…”

Section: Introductionmentioning

confidence: 99%

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Properties of Field Electron Emitter Based on Carbon Nanotubes Installed in the Small-Sized X-Ray Tube

Musatov

Gulyaev

Izrael’yants

et al. 2010

Fullerenes, Nanotubes and Carbon Nanostructures

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A small-sized X-ray tube with a carbon nanotube planar field electron emitter has been manufactured and tested. Field electron emitter was grown by the chemical vapor deposition (CVD) method on a nickel substrate. During long time tests (more than 50 hours) the X-ray tube has demonstrated stable characteristics of the emitter current in the dc mode. Relative emission current fluctuations were about 0.3% at the emitter emission current equal to 550 µA.

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Section: Emission Characteristics Of the X-ray Tube Field Electron Emmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Properties of Field Electron Emitter Based on Carbon Nanotubes Installed in the Small-Sized X-Ray Tube

Musatov

Gulyaev

Izrael’yants

et al. 2010

Fullerenes, Nanotubes and Carbon Nanostructures

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“…[10][11][12] In the study of ZnO:Al whisker triode-type X-ray sources, a sufficient electron emission from the ZnO:Al whiskers to generate X-ray should be obtained and checked. In addition, X-ray imaging is one of the interesting studies to determine whether a sufficient electron emission was obtained.…”

Section: Introductionmentioning

confidence: 99%

X-ray Source with Cold Emitter Fabricated Using ZnO Conductive Whiskers

Ooki

Ohshio

Nishino

et al. 2008

jjap

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A new structure for the surface illuminant X-ray source system using a low-cost aluminum-doped zinc oxide (ZnO:Al) whisker cold emitter is proposed and a prototype setup is introduced. The X-ray source was fabricated using a cold cathode that consists of an aggregation of conductive ZnO:Al whiskers. The ZnO:Al whiskers were deposited on an n-type single crystalline wafer of silicon by an atmospheric chemical-vapor-deposition method. The electron emission current from the ZnO:Al whiskers varied with the Al concentration of ZnO. The diode and triode X-ray sources generated X-rays from the tungsten target used as an anode. X-ray images of a leaf and a small sardine were taken on medical X-ray films. Clear X-ray images were obtained.

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confidence: 99%

Low temperature growth of carbon nanotube on glass substrate and its application in field emission display

Huang

Deng

She

et al. 2007

2007 IEEE 20th International Vacuum Nanoelectronics Conference

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Recently, carbon-nanotube (CNT) has been widely explored for applications in cold cathode fluorescent lamp[1], luminescent tube[2], x-ray source [3][4][5] and field emission display (FED) [6,7] because of its excellent field emission properties. Among all these applications, FED using CNT cathode is very attractive. Some groups have reported FEDs using screen-printed or directly-grown CNT cathode [8]. Compared to screen-printing, directly-growth method had some advantages such as easiness to achieve high resolution and possible lower driving voltage. In this paper, we demonstrated the process of growing CNT on glass and its application in a FED structure.64×48 arrays of patterned CNT were prepared on a glass substrate with the diagonal length of 2-inch. After the glass was ultrasonically cleaned in acetone and alcohol., magnetron sputtering and optical lithography was used to pattern the cathode electrodes and the catalyst. Later the patterned glass was transferred to a programmable CVD furnace. The furnace was pumped to about 1 kPa. After the treatment with 200 sccm hydrogen for 30 min at 550 °C, a mixture of argon, hydrogen and acetylene with the ratio of 200:200:120 was introduced for 20 min. The sample was protected with argon during the cool down. A scanning electron microscopy (SEM, FEI Quanta 400 FEG) was employed to observe the morphology of the CNT cathode. Field emission test using diode structure was done in a vacuum chamber with base pressure of 1×10 -6 Pa. Fig.1 was the SEM image of prepared CNT cathode and the inset shows the CNT patterns prepared on electrodes. The CNTs have little impurity and are in very high density. The length of the CNTs was about several micrometers. The diameter of the CNTs was uniform and was about 30 nm. The field emission characteristic was shown in Fig.2. From Fig.2 we can derived that the turn-on field (corresponding to current density of 10 µA/cm 2 ) and threshold field (corresponding to current density of 1 mA/cm 2 ) were 3.5 V/µm and 8.5 V/µm, respectively. The field emission uniformity was good. If we lower the gap between the anode and cathode to about 50 µm, the driving voltage was lower than 400 V.After the primary test, we applied this kind of CNT cathode on planar gated FED structure. The cathode electrodes were first fabricated by optical lithography and magnetron sputtering. Later an insulated layer composed of SiO 2 and SiN x was coated on top of the glass substrate by plasma enhanced chemical vapor deposition (PECVD, Oxford System 80). Then the gate electrodes were fabricated in the same way as fabricating the cathode electrodes. After that we used reaction ion etching (RIE) to etch the insulated layer to expose the small spots containing catalysts. Finally, CNTs were grown by vacuum thermal CVD method. SEM examination of the prepared FED structure shows that the structure is well fabricated.We have successfully grown CNT on glass that with good field emission properties by 1-4244-1134-3/07/$25.00©2007 209 vacuum thermal CVD method. The method is compatible...

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Carbon nanotubes synthesized by biased thermal chemical vapor deposition as an electron source in an x-ray tube

Cited by 35 publications

References 11 publications

Properties of Field Electron Emitter Based on Carbon Nanotubes Installed in the Small-Sized X-Ray Tube

Properties of Field Electron Emitter Based on Carbon Nanotubes Installed in the Small-Sized X-Ray Tube

X-ray Source with Cold Emitter Fabricated Using ZnO Conductive Whiskers

Low temperature growth of carbon nanotube on glass substrate and its application in field emission display

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