Carbon nanotube vertical membranes for electrostatically actuated micro-electro-mechanical devices

Arun, A.; Acquaviva, D.; Fernández-Bolaños, Montserrat; Salet, P.; Le-Poche, H.; Pantigny, Philippe; Idda, Tonio; Ionescu, Adrian M.

doi:10.1016/j.mee.2009.10.021

Cited by 10 publications

(5 citation statements)

References 3 publications

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“…The capacitance value is scalable by increasing the number of fingers within the interleaved structure. Compared to our previous works [15,16], we report capacitance extraction on two different anchor configurations, larger capacitance than reported earlier using a different catalyst system. We also report the implementation of a VCO using tunable vertical array capacitors that is among the very few circuits implemented to date using CNT MEM devices [17].…”

Section: Introductioncontrasting

confidence: 63%

Tunable MEMS capacitors using vertical carbon nanotube arrays grown on metal lines

et al. 2010

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In this work, tunable MEMS capacitors are realized using a vertically grown carbon nanotube array. The vertical CNT array forms an effective CNT membrane, which can be electrostatically actuated like the conventional metal plates used in MEMS capacitors. The CNT membrane is grown on titanium nitride metal lines, with a Al/Fe bi-layer as buffer layer and catalyst material respectively, using chemical vapor deposition process. Two different anchor configurations are investigated. A maximum capacitance of 400 fF and maximum tunability of 5.8% is extracted from the S-parameter measurements. Using the tunable MEMS vertical array capacitor a voltage controlled oscillator (VCO) is demonstrated showing promise for integrating CNTs for communications applications.

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Section: Introductioncontrasting

confidence: 63%

Tunable MEMS capacitors using vertical carbon nanotube arrays grown on metal lines

et al. 2010

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“…They have the capability of offering high resonant frequencies in the gigahertz range, and the advantage of low energy consumption [27]. Yet, because of their size, these nano-electromechanical systems have a low output signal level [1]. These switches are designed as CNT suspended over a parallel ground electrode.…”

Section: Introductionmentioning

confidence: 99%

Bifurcation and pull-in voltages of primary resonance of electrostatically actuated SWCNT cantilevers to include van der Waals effect

Caruntu

Luo

2016

Meccanica

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In this work the voltage response of primary resonance of electrostatically actuated single wall carbon nano tubes (SWCNT) cantilevers over a parallel ground plate is investigated. Three forces act on the SWCNT cantilever, namely electrostatic, van der Waals and damping. While the damping is linear, the electrostatic and van der Waals forces are nonlinear. Moreover, the electrostatic force is also parametric since it is given by AC voltage. Under these forces the dynamics of the SWCNT is nonlinear parametric. The van der Waals force is significant for values less than 50 nm of the gap between the SWCNT and the ground substrate. Reduced order model method (ROM) is used to investigate the system under soft excitation and weak nonlinearities. The voltageamplitude response and influences of parameters are reported for primary resonance (AC near half natural frequency).

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“…a nano-probe manipulator fitted into a transmission electron microscope was used to mechanically manipulate the CNT [22,23]. Another method was developed where an array of CNTs; called a CNT forest, was electrostatically actuated and the Young's modulus was determined based on the bending obtained [24]. Salvetat et al have used the AFM technique to manipulate the CNTs [25].…”

Section: Introductionmentioning

confidence: 99%

“…The Young's modulus was calculated by integrating the pull-in force relationship [30] into the solution obtained for trajectory. As discussed above, this work aims particularly to overcome the difficulty and inaccuracy of the other methods which are based on experiments [31][32][33], dependent on elliptic integrals and functions [27,34,35], or based on linear beam theory [27,35]. The cantilever beam is assumed to be initially straight, inextensible, rigid in shear, of constant cross-section, and loaded by uniformly distributed forces.…”

Section: Introductionmentioning

confidence: 99%

Analytical Method for Determination of Young’s Modulus of Large Deflection Carbon Nanotube

Tolou¹,

Khiat²,

Zhang³

et al. 2011

International Journal of Nonlinear Sciences and Numerical Simulation

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This paper presents an analytical method for Young's modulus determination of an individual carbon nanotube under electrostatic loading. Using the pull-in force and large deflection solution of the trajectory of a carbon nanotube, the Young's modulus has been determined analytically. To this end the governing equation for carbon nanotube as a cantilever beam under uniform distributed load was derived. The Direct Nonlinear Solution (DNS) by means of the Homotopy-Perturbation Method (HPM) was implemented to derive the large deflection solution of the trajectory of any point along the beam length. The Young's modulus has been calculated through the proposed method and compared to those obtained experimentally. For the verification the deflections were calculated and compared to those of finite element method (FEM) which was taken as a reference. It was found that the proposed solution overcame the shortcomings of conventional methods; such as experimental difficulties in the determination of Young's modulus or the inaccuracy of linear methods and the dependency on the elliptic integrals. It has been shown that the method is very accurate, efficient, and convenient for the problem discussed and can be applied to similar practical problems related to nano-scale devices.

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Carbon nanotube vertical membranes for electrostatically actuated micro-electro-mechanical devices

Cited by 10 publications

References 3 publications

Tunable MEMS capacitors using vertical carbon nanotube arrays grown on metal lines

Tunable MEMS capacitors using vertical carbon nanotube arrays grown on metal lines

Bifurcation and pull-in voltages of primary resonance of electrostatically actuated SWCNT cantilevers to include van der Waals effect

Analytical Method for Determination of Young’s Modulus of Large Deflection Carbon Nanotube

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