Carbon nanotube membranes for EUV photolithography: a versatile material platform

Etula, Jarkko; Soliman, Ahmed; Ghosh, Tuhin; Mikladal, Bjorn; Salmi, Emma; Van Veldhoven, Emile; Chernenko, Kirill; Varjos, Ilkka; Juntunen, Taneli

doi:10.1117/12.2686790

International Conference on Extreme Ultraviolet Lithography 2023 2023

DOI: 10.1117/12.2686790

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Carbon nanotube membranes for EUV photolithography: a versatile material platform

Jarkko Etula,

Ahmed Soliman,

Tuhin Ghosh

et al.

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Carbon nanotube membranes for EUV photolithography: a versatile material platform

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