Carbon monoxide detection with CMOS integrated thin film SnO 2 gas sensor

Lackner, Eva; Krainer, Johanna; Wimmer-Teubenbacher, Robert; Sosada, Florentyna; Deluca, Marco; Gspan, Christian; Rohracher, Karl; Wachmann, E.; Köck, Anton

doi:10.1016/j.matpr.2017.08.007

Cited by 18 publications

(16 citation statements)

References 8 publications

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“…In Figure 3a the responses of an SnO2 film under exposure to CO in the environment is shown, assembled and summarized from several recent works from the group of Köck et al [74,75]. The 50 nm thick film was deposited using a post-CMOS spray pyrolysis technique.…”

Section: Smo Gas Sensormentioning

confidence: 99%

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Thermo-Electro-Mechanical Simulation of Semiconductor Metal Oxide Gas Sensors

Filipovic

Selberherr

2019

Materials

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There is a growing demand in the semiconductor industry to integrate many functionalities on a single portable device. The integration of sensor fabrication with the mature CMOS technology has made this level of integration a reality. However, sensors still require calibration and optimization before full integration. For this, modeling and simulation is essential, since attempting new, innovative designs in a laboratory requires a long time and expensive tests. In this manuscript we address aspects for the modeling and simulation of semiconductor metal oxide gas sensors, devices which have the highest potential for integration because of their CMOS-friendly fabrication capability and low operating power. We analyze recent advancements using FEM models to simulate the thermo-electro-mechanical behavior of the sensors. These simulations are essentials to calibrate the design choices and ensure low operating power and improve reliability. The primary consumer of power is a microheater which is essential to heat the sensing film to appropriately high temperatures in order to initiate the sensing mechanism. Electro-thermal models to simulate its operation are presented here, using FEM and the Cauer network model. We show that the simpler Cauer model, which uses an electrical circuit to model the thermo-electrical behavior, can efficiently reproduce experimental observations.

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Section: Smo Gas Sensormentioning

confidence: 99%

“…Sensing response of an SnO2 film after exposure to carbon monoxide from several publications. ( a ) Köck et al [74,75] show the influence of temperature and gold doping on the operation of a 50 nm thin film. ( b ) Mädler et al [77] show the role that platinum (Pt) doping plays on CO detection.…”

Section: Figurementioning

confidence: 99%

Thermo-Electro-Mechanical Simulation of Semiconductor Metal Oxide Gas Sensors

Filipovic

Selberherr

2019

Materials

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“…[26][27][28][29][30][31] SnO 2 is also the material which was shown to be the easiest to integrate into the CMOS silicon technology. 13,44,74,85 Figure 5a shows the response of an SnO 2 thin film to the presence of carbon monoxide (CO) in the environment, compiled from recent publications from A. Köck et al 44,86 Here, and in subsequent figures, the sensitivity is represented as the ratio, in percent, of the resistance reduction when in the presence of a target gas, compared to the resistance in air or inert ambient, given by…”

Section: Semiconductor Metal Oxide Sensorsmentioning

confidence: 99%

“…SnO 2 thin film sensor response during exposure to a varying concentration of carbon monoxide (CO) gas. In (a) Köck et al 44,86 showed the influence of temperature and evaporated gold particles on the sensor response on a 50nm thin spray deposited film. In (b) the Mädler et al 87 discussed the influence of platinum (Pt) doping on a spray deposited SnO 2 film.…”

Section: Microheater Designmentioning

confidence: 99%

Review—System-on-Chip SMO Gas Sensor Integration in Advanced CMOS Technology

Filipovic

Lahlalia

2018

J. Electrochem. Soc.

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The growing demand for the integration of functionalities on a single device is peaking with the rise of IoT. We are near to having multiple sensors in portable and wearable technologies, made possible through integration of sensor fabrication with mature CMOS manufacturing. In this paper we address semiconductor metal oxide sensors, which have the potential to become a universal sensor since they can be used in many emerging applications. This review concentrates on the gas sensing capabilities of the sensor and summarizes achievements in modeling relevant materials and processes for these emerging devices. Recent advances in sensor fabrication and the modeling thereof are further discussed, followed by a description of the essential electro-thermal-mechanical analyses, employed to estimate the devices' mechanical reliability. We further address advances made in understanding the sensing layer, which can be modeled similar to a transistor, where instead of a gate contact, the ionosorped gas ions create a surface potential, changing the film's conduction. Due to the intricate nature of the porous sensing films and the reception-transduction mechanism, many added complexities must be addressed. The importance of a thorough understanding of the electro-thermal-mechanical problem and how it links to the operation of the sensing film is thereby highlighted.

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“…To monitor the CO 2 concentration, most conventional technologies rely on either optical, electrochemical, capacitive, work‐function‐based, or resistance‐based sensors . Among these, resistance‐based CO 2 sensors based on metal oxide semiconductor technology have an important advantage, namely the possibility of developing them into array‐integrated gas sensors …”

Section: Introductionmentioning

confidence: 99%

Polycrystalline SnO₂ Visible‐Light‐Transparent CO₂ Sensor Integrated with NiO/ZnO Solar Cell for Self‐Powered Devices

Tanuma

Sugiyama

2019

Physica Status Solidi (a)

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Monolithic visible‐light‐transparent carbon dioxide (CO2) sensor/solar cell‐integrated devices are fabricated using RF sputtering. The optical transmittance of the integrated device in the visible region is found to be over 60%. The solar cell is composed of p‐type NiO and n‐type ZnO layers, and exhibits small but noticeable photovoltaic effect under illumination. The CO2 sensor layer is made from LaOCl/SnO2 layers, and its resistance varies when electrical power is supplied from an external power source. XPS measurement reveals that adsorbed oxygen, which influences the sensitivity of gas sensors, increases with increasing LaOCl catalyst concentration. The results of this study can serve as a first step toward achieving a new type of visible‐light‐transparent CO2 sensor/UV absorbed solar cell for integrated self‐powered devices.

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Carbon monoxide detection with CMOS integrated thin film SnO 2 gas sensor

Cited by 18 publications

References 8 publications

Thermo-Electro-Mechanical Simulation of Semiconductor Metal Oxide Gas Sensors

Thermo-Electro-Mechanical Simulation of Semiconductor Metal Oxide Gas Sensors

Review—System-on-Chip SMO Gas Sensor Integration in Advanced CMOS Technology

Polycrystalline SnO₂ Visible‐Light‐Transparent CO₂ Sensor Integrated with NiO/ZnO Solar Cell for Self‐Powered Devices

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Carbon monoxide detection with CMOS integrated thin film SnO 2 gas sensor

Cited by 18 publications

References 8 publications

Thermo-Electro-Mechanical Simulation of Semiconductor Metal Oxide Gas Sensors

Thermo-Electro-Mechanical Simulation of Semiconductor Metal Oxide Gas Sensors

Review—System-on-Chip SMO Gas Sensor Integration in Advanced CMOS Technology

Polycrystalline SnO2 Visible‐Light‐Transparent CO2 Sensor Integrated with NiO/ZnO Solar Cell for Self‐Powered Devices

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Product

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Polycrystalline SnO₂ Visible‐Light‐Transparent CO₂ Sensor Integrated with NiO/ZnO Solar Cell for Self‐Powered Devices