2011
DOI: 10.4028/www.scientific.net/amm.135-136.347
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Carbon Dioxide Gas Sensor Using SAW Device Based on ZnO Film

Abstract: Carbon dioxide (CO2) gas sensor using surface acoustic wave (SAW) device based on Zinc oxide (ZnO) was developed and fabricated in this paper. The center frequency of SAW device is 203.528 MHz. The input and two output interdigital transducers (IDT) apodized by Morlet wavelet function can improve the side lobe rejection compared with uniform IDT. The ZnO film sensitive to CO2 gas was fabricated in measurement acoustic track of SAW device. Experiments results confirm that the CO2 gas sensor using SAW device bas… Show more

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Cited by 9 publications
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“…As such, there is a great demand for a wireless and passive gas sensor to enable effective monitoring. To date, various wireless sensing devices have been created to monitor harmful gases, which use different measuring mechanisms, such as surface acoustic wave (SAW) [6][7][8], wireless passive LC resonance [9,10], and microwave evanescent mode [11,12], etc.…”
Section: Introductionmentioning
confidence: 99%
“…As such, there is a great demand for a wireless and passive gas sensor to enable effective monitoring. To date, various wireless sensing devices have been created to monitor harmful gases, which use different measuring mechanisms, such as surface acoustic wave (SAW) [6][7][8], wireless passive LC resonance [9,10], and microwave evanescent mode [11,12], etc.…”
Section: Introductionmentioning
confidence: 99%
“…Since the beginning of industrialisation, the combustion of fossil fuels, the operation of motor vehicles and industrial plants, the generation of electricity, as well as, the deforestation have caused the increase of atmospheric CO 2 concentration by one-third from 280 to 412 ppm (Baik and Jang, 2020; Wen et al , 2012). In the face of rapid urbanisation and industrialisation, the gradual increase of CO 2 emissions becomes a major concern worldwide in the following years, damaging both the environment and human health (Çolak and Karaköse, 2019; Joshi et al , 2019).…”
Section: Introductionmentioning
confidence: 99%
“…Surface Acoustic Wave (SAW) nanosensors for various types of gases with sensitive elements made of nanofilms, such as graphene oxide (Balashov et al, 2013;Xuan et al, 2015), carbon nanotubes decorated with nanoparticles (Sivaramakrishnan et al, 2008), or nanorods of zinc oxide (Wen et al, 2011), present excellent sensitivity and a short response time. The sensitive elements in such sensors are the thin films with thickness on the order of nanometers that guarantee the short response and recovery times of the device.…”
Section: Introductionmentioning
confidence: 99%