2009
DOI: 10.1080/00207540802415568
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Capacity planning with sequential two-level time constraints in the back-end process of wafer fabrication

Abstract: A time constraint is a queue-time boundary that is set between particular sequential operations to ensure final product yield. These time boundaries, called 'sequential time constraints', can be found in a series of operations on the backend of wafer fabrication. Wafers exceeding the time constraints are traced through the fabrication process, but generally pass through the remaining processes. Nonetheless, it is a waste of capacity to continue processing wafers with unacceptable yield. Unfortunately, these un… Show more

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Cited by 14 publications
(3 citation statements)
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References 19 publications
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“…In this work, the machine failures were regarded as irregular customers whose arrival rate and mean service time are 1/(MTTR þ MTBF) and MTTR, respectively. We assumed that the machine failures were operation dependent and only affected the service data of the system (Tu and Chen 2009). To reveal the effect of machine interrupts, the mean service time and SCV of service time were modified.…”
Section: 23mentioning
confidence: 99%
“…In this work, the machine failures were regarded as irregular customers whose arrival rate and mean service time are 1/(MTTR þ MTBF) and MTTR, respectively. We assumed that the machine failures were operation dependent and only affected the service data of the system (Tu and Chen 2009). To reveal the effect of machine interrupts, the mean service time and SCV of service time were modified.…”
Section: 23mentioning
confidence: 99%
“…The semiconductor manufacturing process includes wafer fabrication, probing, assembly and final testing steps. The back-end process of semiconductor manufacturing consists of steps that follows water fabrication (Guo, Chiang, & Pai, 2007; Tu & Chen, 2009; Lin & Chen, 2015). Because semiconductor back-end manufacturing process usually operates with a short lead-time and absorbs the effect of lead time variance in the front-end process, the back-end manufacturing environment is of highly uncertainties and dynamics (Lin & Chen, 2015; Fu, Askin, Fowler, & Zhang, 2015).…”
Section: Introductionmentioning
confidence: 99%
“…Tu et al (2005) develop a performance evaluation model using the queueing theory and Little's Law to evaluate the effects of backup capacity, work in process, and the cycle time in semiconductor manufacturing. Tu and Chen (2008) study the capacity planning problem in GI/G/m queueing network systems to determine the required number of machines under the process queue time constraint.…”
mentioning
confidence: 99%