2019 13th International Conference on Sensing Technology (ICST) 2019
DOI: 10.1109/icst46873.2019.9047700
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Capacitive Transduction Schemes for Environmental Humidity Sensors

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“…The electrode separation specifies the width of the empty area between consecutive electrodes . Some different shapes of humidity sensors are exhibited in Figure …”
Section: Common Humidity Sensor Designsmentioning
confidence: 99%
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“…The electrode separation specifies the width of the empty area between consecutive electrodes . Some different shapes of humidity sensors are exhibited in Figure …”
Section: Common Humidity Sensor Designsmentioning
confidence: 99%
“…9 Some different shapes of humidity sensors are exhibited in Figure 2. 11 When sensitivity is important, for example, SRE and spiral electrodes should be used. However, because these two configurations are more complicated than the other two, their yield rates are lower than the other two.…”
Section: Common Humidity Sensor Designsmentioning
confidence: 99%