2006
DOI: 10.1109/jsen.2005.854137
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Capacitive transducers with curved electrodes

Abstract: The design, performance, and potential applications are described for capacitive transducers with curved electrodes. A curved electrode governs the deflection of a compliant electrode under applied stress. A dielectric film on one electrode provides a variable region of fixed electrode spacing. The sensitivity and linear dynamic range of the transducers are higher and wider than devices with parallel electrodes. An electrical advantage is obtained from the permittivity of the dielectric film and a mechanical a… Show more

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Cited by 21 publications
(6 citation statements)
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“…There are several suitable materials, which include silver/silver chloride (Ag/AgCl) [15], titanium nitride (TiN), platinum (Pt) [16] and iridium oxide (IrO2) [17]. Nonetheless, IrO2 has been proven to be one of the most promising and preferred materials for electrodes [18], [19] due to its high charge delivery capacity, low constant impedance over the entire frequency range for neural stimulation and biocompatibility [20].…”
Section: Electrode Designmentioning
confidence: 99%
“…There are several suitable materials, which include silver/silver chloride (Ag/AgCl) [15], titanium nitride (TiN), platinum (Pt) [16] and iridium oxide (IrO2) [17]. Nonetheless, IrO2 has been proven to be one of the most promising and preferred materials for electrodes [18], [19] due to its high charge delivery capacity, low constant impedance over the entire frequency range for neural stimulation and biocompatibility [20].…”
Section: Electrode Designmentioning
confidence: 99%
“…In one circuit, a capacitor is placed in a bridge circuit with a reference capacitor and the bridge is actively nulled by current feedback to provide a linear output over a wide dynamic range [15], [16].…”
Section: B Electronicsmentioning
confidence: 99%
“…Different reports on the design, characterization, operation and possible applications of such devices have been given by the author 1,2) and others [3][4][5][6][7] . A CMOS-compatible capacitive high temperature pressure sensor was reported 8) .…”
Section: Introductionmentioning
confidence: 99%