Capacitive sensors in CMOS technology with polymer coating

Cornila, C.; Hierlemann, Andreas; Lenggenhager, R.; Malcovati, P.; Baltes, H.; Noetzel, Gerd; Weimar, Udo; ̈pel, W. Go

doi:10.1016/0925-4005(95)85080-5

Cited by 54 publications

(42 citation statements)

References 3 publications

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“…Detector types of interest include carbon black-insulating polymer composites [1], conducting organic polymers [2][3][4], polymer-coated quartz crystal microbalances (QCM) [5], polymer-coated surface acoustic wave (SAW) devices [6,7], polymer-coated capacitors [8], and arrays of dye-impregnated polymeric beads or coated optical fibers [9][10][11]. The responses of such sorption-based detectors depend primarily on the partition coefficient of the gaseous analyte into the polymer [12].…”

Section: Introductionmentioning

confidence: 99%

Exploitation of spatiotemporal information and geometric optimization of signal/noise performance using arrays of carbon black-polymer composite vapor detectors

Briglin

Freund

Tokumaru

et al. 2002

Sensors and Actuators B: Chemical

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We have investigated various aspects of the geometric and spatiotemporal response properties of an array of sorption-based vapor detectors. The detectors of specific interest are composites of insulating organic polymers filled with electrical conductors, wherein the detector film provides a reversible dc electrical resistance change upon the sorption of an analyte vapor. An analytical expression derived for the signal/noise performance as a function of detector volume implies that there is an optimum detector film volume which will produce the highest signal/noise ratio for a given carbon black-polymer composite when exposed to a fixed volume of sampled analyte. This prediction has been verified experimentally by exploring the response behavior of detectors having a variety of different geometric form factors. We also demonstrate that useful information can be obtained from the spatiotemporal response profile of an analyte moving at a controlled flow velocity across an array of chemically identical, but spatially nonequivalent, detectors. Finally, we demonstrate the use of these design principles, incorporated with an analysis of the changes in detector signals in response to variations in analyte flow rate, to obtain useful information on the composition of analytes and analyte mixtures. #

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Section: Introductionmentioning

confidence: 99%

Exploitation of spatiotemporal information and geometric optimization of signal/noise performance using arrays of carbon black-polymer composite vapor detectors

Briglin

Freund

Tokumaru

et al. 2002

Sensors and Actuators B: Chemical

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“…More recent applications also include the detection of VOCs in the gas phase using polymeric layers [23,72,73].…”

Section: Chemocapacitorsmentioning

confidence: 99%

“…Since the nominal capacitance of microstructured capacitors (eg, electrode width and spacing: 1.6 lm, footprint: 800 × 800 lm 2 ) is of the order of 1 pF and the expected capacitance changes are in the attofarad range, an integrated solution with on-chip circuitry is required [72].…”

Section: Chemocapacitorsmentioning

confidence: 99%

“…Typical chemocapacitor applications include humidity sensing with polyimide films [72,74,75], since water has a high dielectric constant of 78.5 (liquid state) at 298 K, leading to large capacitance changes. More recent applications also include the detection of VOCs in the gas phase using polymeric layers [23,72,73].…”

Section: Chemocapacitorsmentioning

confidence: 99%

“…Two effects change the capacitance of, eg, a polymeric sensitive layer upon absorption of an analyte: (i) swelling and (ii) change of the dielectric constant due to incorporation of the analyte molecules into the polymer matrix [23,72,73]. Interdigitated electrode structures are predominantly used for capacitance measurements [74,75].…”

Section: Chemocapacitorsmentioning

confidence: 99%

See 2 more Smart Citations

CMOS Single Chip Gas Detection Systems — Part I

et al. 2002

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The current trend to control indoor air-quality and to monitor environmental pollution has created a strong demand for miniaturized and inexpensive gas sensors for volatile organic compounds (VOCs). Gas sensor arrays based on industrial CMOS-processes combined with post-CMOS micromachining (CMOS MEMS) are a promising approach to low-cost sensor devices. In this article, the state of research of CMOS-based gas sensor systems is reviewed, and a platform technology is described, which provides the possibility of monolithically integrating several different transducers on a single chip. A design environment, batch-fabrication processes, and fast testing procedures were developed to realize an example single-chip gas detection system. The chip includes the transducers, their biasing circuitry, reference elements, a digital interface, and a temperature sensor. The three polymer-based transducers and their interface electronics will be detailed in the second part of this article [1].

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Electronic Sensing of Tastes

Toko

1998

Electroanalysis

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Capacitive sensors in CMOS technology with polymer coating

Cited by 54 publications

References 3 publications

Exploitation of spatiotemporal information and geometric optimization of signal/noise performance using arrays of carbon black-polymer composite vapor detectors

Exploitation of spatiotemporal information and geometric optimization of signal/noise performance using arrays of carbon black-polymer composite vapor detectors

CMOS Single Chip Gas Detection Systems — Part I

Electronic Sensing of Tastes

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