Capacitive Sensor for Three-Axis Force Measurements and Its Readout Electronics

Large deformation mechanics of a soft elastomeric layer under compressive loading for a MEMS tactile sensor application

“…The electrodes are usually embedded in gel (PDMS) [1,18,20,21,26,27] in pair arrangements for sensor capacitance measurements. As established elsewhere [28,29] the capacitance between two electrodes is proportional to the electrode overlapping area while inversely proportional to the spacing distance between electrodes. Deformations induced by surface contact normal and shear stresses in the proximity of the electrode gap cause changes both in the electrode overlapping area as well as the electrode spacing distance.…”

“…The above condition must remain true and can be used as an alternative to (29) in calculating the constant B. However, the above condition as in condition (29) still requires knowledge of L, i.e., the extent over which the shear stress T 21 (x 1 , 0) vanishes.…”

“…5, one could use either Eq. (29) or Eq. (31) in enforcing global equilibrium in the x 1 direction as required to calculate the constant B.…”

Tactile sensing for dexterous in-hand manipulation in robotics—A review

“…da Rocha et al present another configuration of plates for measuring both vertical and horizontal contact forces [83]. Each sensor consists of four variable capacitors that share the same top electrode.…”

High precision intelligent flexible grasping front-end with CMOS interface for robots application

“…Our previous work includes an analysis of flexible capacitive tactile sensors [8][9][10]. The performance of different structures has been discussed in [11][12][13]. In an innovative method, each capacitive sensor is equipped with an interface chip [14], which should become the prototype for tactile sensors in the future.…”