Capacitive pressure sensors realized with LTCC technology

Belavič, Darko; Zarnik, Marina Santo; Maček, Srečko; Jerlah, Mitja; Hrovat, Marko; Pavlin, Marko

doi:10.1109/isse.2008.5276589

Cited by 13 publications

(7 citation statements)

References 6 publications

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“…Our previous investigations of capacitive pressure sensors (CPSs), fabricated using low-temperature cofired ceramic materials and technology (Belavič et al, 2008Zarnik et al, 2009Zarnik et al, , 2010, showed very promising results. However, the preliminary tests also revealed a high sensitivity and vulnerability of the sensors' operation to the parasitic elements introduced by the measurement setup and through the surrounding media, particularly if the design is not optimised.…”

Section: Introductionmentioning

confidence: 99%

Design study for a capacitive ceramic pressure sensor

Zarnik

Belavič²,

Maček³

2011

Microelectronics International

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Purpose -The purpose of this paper is to consider a capacitive pressure sensor fabricated using low-temperature cofired ceramic (LTCC) materials and technology as a candidate for an energy-autonomous sensor application. Designing the 3D capacitive sensor structure, with the cofired thick-film electrodes inside the narrow air gap in the LTCC substrate, was a challenging task, particularly due to the presence of the parasitic elements influencing the sensor's characteristics. Design/methodology/approach -In this work, different design variants for the thick-film electrodes of the capacitive sensing structure were studied and compared. The test sensors were designed for the pressure range 0-10 kPa and manufactured with readout electronics based on a capacitance-todigital conversion. Findings -The typical sensitivity obtained was 4 fF/kPa, and the temperature coefficient of the sensitivity was 0.03%/8C. The design variant with the guard-ring electrode showed the best rms resolution of 50 Pa. One drawback of the application could be the sensitivity to atmospheric humidity and the influence of the different media. Originality/value -This paper focuses on the design of a capacitive gas-pressure sensor in a 3D LTCC structure. The present study provides a good basis for further optimisation of the design of the cofired electrodes in the capacitive sensing structure.

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Section: Introductionmentioning

confidence: 99%

Design study for a capacitive ceramic pressure sensor

Zarnik

Belavič²,

Maček³

2011

Microelectronics International

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“…The pressure-induced deflection of the membrane change the distance between the electrodes and, consequently, the capacitance of the sensing structure [118,119]. The schematics of the diaphragm-type capacitive ceramic pressure sensor for measurements of the relative gas pressure, based on changing the distance between the electrodes of an aircapacitor is presented in Fig.…”

Section: Capacitance Principlementioning

confidence: 99%

Overview on low temperature co-fired ceramic sensors

Jurków

Maeder

Dąbrowski

et al. 2015

Sensors and Actuators A: Physical

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Low Temperature Co-fired Ceramics (LTCC) is one of the microelectronic techniques. This technology was initially developed as an alternative to Printed Circuit Boards (PCB) and classical thick-film technology, and it has found application in the fabrication of multilayer ceramic boards for electronic devices. Fast and wide development of this technology permitted the fabrication of 3D mechanical structures and integration with various different processes. Thanks to this, LTCC has found application in the manufacturing of various microelectronic devices. This paper presents an overview on LTCC technology and gives a detailed summary on physical quantity sensors fabricated using LTCC technique.

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“…1. Typical sensor characteristics were discussed in [6][7][8]. Furthermore, it was presented in [9] that the effect of humidity on the sensor characteristics can be a problem, even for the differential mode of operation and an optimised design of the electrodes.…”

Section: Capacitive Ceramic Pressure Sensormentioning

confidence: 99%

The Effect of Humidity on the Stability of LTCC Pressure Sensors

Zarnik¹,

Belavič²

2012

Metrology and Measurement Systems

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LTCC-based pressure sensors are promising candidates for wet-wet applications in which the effect of the surrounding media on the sensor's characteristics is of key importance. The effect of humidity on the sensor's stability can be a problem, particularly in the case of capacitive sensors. A differential mode of operation can be a good solution, but manufacturing the appropriate sensing capacitors remains a major challenge. In the case of piezoresistive sensors the influence of humidity is less critical, but it still should be considered as an important parameter when designing sensors for low-pressure ranges. In this paper we discuss the stability of the sensors' offset characteristics, which was inspected closely using experimental and numerical analyses.

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Capacitive pressure sensors realized with LTCC technology

Cited by 13 publications

References 6 publications

Design study for a capacitive ceramic pressure sensor

Design study for a capacitive ceramic pressure sensor

Overview on low temperature co-fired ceramic sensors

The Effect of Humidity on the Stability of LTCC Pressure Sensors

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