Capacitive micromachined ultrasonic transducers: next-generation arrays for acoustic imaging?

Oralkan, Ömer; Ergun, A.S.; Johnson, Jeremy A.; Karaman, Mustafa; Demirci, Utkan; Kaviani, K.; Lee, T.H.; Khuri‐Yakub, Butrus T.

doi:10.1109/tuffc.2002.1049742

Cited by 432 publications

(215 citation statements)

References 41 publications

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“…Presented for the first time in 1994 by Haller and Khuri-Yakub [9], CMUT transducers have been deeply studied for ultrasonic imaging purposes [10]- [15] until the recent first international commercialization of a CMUT linear probe [16]. Several studies have also assessed the potential benefits of CMUT arrays for therapeutic intents, but all have been strictly circumscribed to high-intensity focused ultrasound (HIFU) [17] [18] [19] [20] [21].…”

Section: Introductionmentioning

confidence: 99%

Evaluation of an Ultrasound-Guided Focused Ultrasound CMUT Probe for Targeted Therapy Applications

Gross¹,

Legros

Vince³

et al. 2018

OJAppS

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Capacitive Micromachined Ultrasonic Transducer (CMUT) technology, which has been widely studied in the field of medical imaging, possesses strong design flexibility due to its manufacturing process. Many applications could benefit from this unique feature, especially those that require different operating ultrasonic frequencies. This article reports on the characterization of the therapeutic low-frequency field provided by an ultrasound-guided focused ultrasound CMUT probe that is connected to a custom ultrasonic scanner for hyperthermia applications. The study begins by mapping the focused ultrasonic beam in the vicinity of the focal spot and a parametric analysis providing the maximum peak-to-peak (PTP) pressure delivered by the probe under different acoustic conditions. The measured maximum PTP pressure at the targeted operating frequency of 1 MHz is 3 MPa, with a maximum of 3.6 MPa at 1.25 MHz. Based on an in vitro setup found in the literature, the temperature elevation at the focal point was measured, showing results in agreement with the targeted applications (max. ∆T = 7.5˚C). The article concludes with a reliability study considering the delivered pressure and the self-heating of the CMUT probe: the results show the good stability of the pressure amplitude over 1.8 × 10 9 cycles at a duty cycle of 40%, with a moderate internal heating of 3˚C.

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Section: Introductionmentioning

confidence: 99%

Evaluation of an Ultrasound-Guided Focused Ultrasound CMUT Probe for Targeted Therapy Applications

Gross¹,

Legros

Vince³

et al. 2018

OJAppS

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“…Introduction C apacitive micromachined ultrasonic transducers (cMUTs) [1]- [3] have the potential of replacing piezoelectric transducers in many areas. The applications include air-coupled nondestructive testing [4], [5], medical imaging [6], [7], three-dimensional (3-D) immersion imaging with 2-D transducer arrays [8], flow meters, level meters, position and distance measurements and microphones. Recently, analytical and computational models for the cMUTs have been developed [9]- [12].…”

mentioning

confidence: 99%

Optimization of the gain-bandwidth product of capacitive micromachined ultrasonic transducers

Ölçüm

Senlik

Atalar

2005

IEEE Trans. Ultrason., Ferroelect., Freq. Contr.

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Abstract-Capacitive micromachined ultrasonic transducers (cMUT) have large bandwidths, but they typically have low conversion efficiencies. This paper defines a performance measure in the form of a gain-bandwidth product and investigates the conditions in which this performance measure is maximized. A Mason model corrected with finite-element simulations is used for the purpose of optimizing parameters. There are different performance measures for transducers operating in transmit, receive, or pulse-echo modes. Basic parameters of the transducer are optimized for those operating modes. Optimized values for a cMUT with silicon nitride membrane and immersed in water are given. The effect of including an electrical matching network is considered. In particular, the effect of a shunt inductor in the gain-bandwidth product is investigated. Design tools are introduced, which are used to determine optimal dimensions of cMUTs with the specified frequency or gain response.

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“…Ultrasound is not only useful to bat, in many industry and research fields, such as NonDestructive Evaluation (NDE), medical imaging, obstacle identification, acoustic microscopy and so on, it plays also an important roll [1][2]. One attractive feature of ultrasound is that it can provide inside information of the object without contact on it.…”

Section: Ultrasonic Transducer -An Overviewmentioning

confidence: 99%

Ultrasonic Transducers

2014

Ultrasonic Technology for Desiccant Regeneration

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Capacitive micromachined ultrasonic transducers: next-generation arrays for acoustic imaging?

Cited by 432 publications

References 41 publications

Evaluation of an Ultrasound-Guided Focused Ultrasound CMUT Probe for Targeted Therapy Applications

Evaluation of an Ultrasound-Guided Focused Ultrasound CMUT Probe for Targeted Therapy Applications

Optimization of the gain-bandwidth product of capacitive micromachined ultrasonic transducers

Ultrasonic Transducers

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