Capacitive micromachined ultrasonic transducer: transmission performance evaluation under different driving parameters and membrane stress for underwater imaging applications

Yasar, Abdullah Irfan; Yildiz, Fikret; Eroğul, Osman

doi:10.1007/s00542-020-04827-4

Cited by 3 publications

(1 citation statement)

References 23 publications

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“…Collapse voltage, which is defined as the bias voltage causing the failure of membrane. The value depends on stiffness, gap and overall area [29]. As the sensitivity increases with higher V DC as shown in Equation ( 10), the design with higher collapse voltage improves the signal-to-noise ratio.…”

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confidence: 99%

MEMS Acoustic Emission Sensors

Ozevin

2020

Applied Sciences

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This paper presents a review of state-of-the-art micro-electro-mechanical-systems (MEMS) acoustic emission (AE) sensors. MEMS AE sensors are designed to detect active defects in materials with the transduction mechanisms of piezoresistivity, capacitance or piezoelectricity. The majority of MEMS AE sensors are designed as resonators to improve the signal-to-noise ratio. The fundamental design variables of MEMS AE sensors include resonant frequency, bandwidth/quality factor and sensitivity. Micromachining methods have the flexibility to tune the sensor frequency to a particular range, which is important, as the frequency of AE signal depends on defect modes, constitutive properties and structural composition. This paper summarizes the properties of MEMS AE sensors, their design specifications and applications for detecting the simulated and real AE sources and discusses the future outlook.

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confidence: 99%