Capacitive, Highly Selective Zeolite-Based Ammonia Sensor for Flue Gas Applications

Abstract

The selective detection of different gas components will remain of huge importance in the future, either in the ambient air or in flue gases, e.g., for controlling purposes of combustion processes. The focus here is on the development of a highly selective ammonia sensor that will be exemplarily used in the flue gas of biomass combustion plants with catalysts for nitrogen oxide reduction. Such applications require a robust sensor design, in this case, based on a ceramic substrate. The gaseous ammonia is detected with the help of a zeolite film, whose selective adsorption properties towards ammonia are already intensively being used in the field of flue gas catalysis. The adsorption and desorption of ammonia on the gas-sensitive zeolite film lead to changes in the dielectric properties of the functional material. Using an interdigital electrode (IDE) structure below the zeolite film, the capacitance was determined as a measure of the ammonia concentration in the gas. In this context, the fabrication of all layers of the sensor in the thick film with subsequent laser patterning of the IDE structure enables a cost-efficient and effective method. The functionality of this sensor principle was extensively tested during measurements in the laboratory. A high and fast response to ammonia was detected at different sensor temperatures. In addition, very low cross-sensitivities to other gas components such as water (very low) and oxygen (zero) were found.