2022
DOI: 10.1016/j.bios.2022.113975
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Capacitive biosensor based on vertically paired electrodes for the detection of SARS-CoV-2

Abstract: Vertically paired electrodes (VPEs) with multiple electrode pairs were developed for the enhancement of capacitive measurements by optimizing the electrode gap and number of electrode pairs. The electrode was fabricated using a conductive polymer layer of PEDOT:PSS instead of Ag and Pt metal electrodes to increase the VPE fabrication yield because the PEDOT:PSS layer could be effectively etched using a reactive dry etching process. In this study, sensitivity enhancement was realized by decreasing the electrode… Show more

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Cited by 25 publications
(20 citation statements)
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References 63 publications
(105 reference statements)
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“…Thermal deposition was performed using a conventional parylene deposition system obtained from Kisco (Osaka, Japan). [4][5][6][7][8] Deposition was conducted in three steps: (1) evaporation of the parylene-C dimer at 160 °C, (2) decomposition of the parylene-C precursor to reactive free radicals (monomers) at 650 °C, and (3) polymerization of the free radicals at ambient temperature. The entire process was performed under a vacuum of 5.3 Pa (40 mTorr), and the film thickness was controlled by the initial amount of parylene-C dimer used.…”
Section: Preparation and Pyrolysis Of Parylene-cmentioning
confidence: 99%
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“…Thermal deposition was performed using a conventional parylene deposition system obtained from Kisco (Osaka, Japan). [4][5][6][7][8] Deposition was conducted in three steps: (1) evaporation of the parylene-C dimer at 160 °C, (2) decomposition of the parylene-C precursor to reactive free radicals (monomers) at 650 °C, and (3) polymerization of the free radicals at ambient temperature. The entire process was performed under a vacuum of 5.3 Pa (40 mTorr), and the film thickness was controlled by the initial amount of parylene-C dimer used.…”
Section: Preparation and Pyrolysis Of Parylene-cmentioning
confidence: 99%
“…For the preparation of a standard curve the positive samples are frequently used as standard samples by serial dilution. 6,20…”
Section: Electrochemical Analysismentioning
confidence: 99%
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“…A vertical nanogap device, on the other hand, did not require advanced nanopatterning techniques to precisely control the gap distance. The size of nanogaps formed between the top and bottom electrodes was readily determined by the thickness of the dielectric spacer layer in between. However, the vertical nanogap device had complexity in structural design and fabrication processes and showed a higher level of leakage current due to larger areas of overlap between the electrodes. Moreover, bioreceptor functionalization, analyte binding, and washing steps took much longer since biochemical molecules had limited access to the nanogaps, only through the narrow side openings close to the substrate.…”
Section: Introductionmentioning
confidence: 99%