Capacitance-voltage characterization of pulsed plasma polymerized allylamine dielectrics for flexible polymeric field effect transistors

Abstract

Polyallylamine films, deposited on Si wafers by radio frequency (RF) pulsed plasma polymerization (PPP), were employed as insulating layers of metalinsulator-semiconductor (MIS) capacitors. The insulating polymer films were deposited at plasma reactor temperatures of 25°C and 100°C. Multiple frequency capacitance-voltage (C-V) measurements indicated that an in-situ heat treatment during film deposition increased the insulator dielectric constant. The dielectric constant, calculated from the C-V data, rose from 3.03 for samples with no heat treatment to 3.55 for samples with an in-situ heat treatment. For both sample sets, the I-V data demonstrates a low leakage current value (Ͻ20 fA) up to 100 V. Capacitance-time (C-t) measurements were also used to characterize the mobile ions in the polymer that migrate over time with applied voltage. Results indicate that the polymer layers contain few electrically active defect centers and virtually no pinholes. Hysteresis in the C-V curves with differing sweep directions was more pronounced for in-situ heat-treated samples indicative of mobile charge.

Plasma‐Polymerized Multistacked Organic Bipolar Films: A New Approach to Flexible High‐κ Dielectrics

“…[18,19] In this experiment, it is confirmed that a significant number of -COO À and -NH 3 þ polar entities, generated from the interaction of the polyvinylacetic acid and the polyallyl amine films, is present in the layered polymer films as shown by XPS and ATR FT-IR analysis. The k values, in the range of 5.7-6.2 at 1 MHz obtained without any post-deposition annealing, are relatively high for purely organic films containing only oxygen and nitrogen as heteroatoms.…”

“…It should be noted that all the devices in this study were measured without any post-deposition annealing. [18] The inset of Figure 6 shows the hysteresis behavior of the J-V characteristics for a 10-layer stack of polymer films. Some hysteresis is observed in alternating forward and backward voltage sweeps.…”

Young's modulus of plasma‐polymerized allylamine films using micromechanical cantilever sensor and laser‐based surface acoustic wave techniques

“…The use of organic thin films is an attractive way of immobilizing molecules and achieving superhydrophobic and dielectric coatings . Organic thin films can be directly deposited on almost any substrate by using a plasma‐assisted polymerization process .…”

Alternating Current Electrical Properties of Thin Films of Plasma Polymerized 1, 1, 3, 3‐Tetramethoxypropane

“…Xu et al . reported that polyallylamine films, deposited on Si wafers by radio frequency pulsed plasma polymerization, were employed as insulating layers of metal‐insulator‐semiconductor capacitors.…”