In this study the reverse bias annealing effect on the density of states (DOS) in a-Si:H film was investigated. In order to discover the effect of reverse bias thermal annealing on the DOS in a p/i/n structure of SnO 2 /a-SiC:H(p + -type)/a-Si:H(intrinsic)/a-Si:H(n + -type)/Al, capacitance-frequency characteristics were measured in the frequency range of 5 Hz-100 kHz for annealing temperatures of 23-175 • C. The changes in the DOS of the i-region and of the n-region for the different annealing temperatures were determined by means of Pfleiderer's model and the results are listed in a table.