2012
DOI: 10.1063/1.4770119
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Cantilever anemometer based on a superconducting micro-resonator: Application to superfluid turbulence

Abstract: We present a new type of cryogenic local velocity probe that operates in liquid helium (1 K < T < 4.2 K) and achieves a spatial resolution of ≈ 0.1 mm. The operating principle is based on the deflection of a micro-machined silicon cantilever which reflects the local fluid velocity. Deflection is probed using a superconducting niobium micro-resonator sputtered on the sensor and used as a strain gauge. We present the working principle and the design of the probe, as well as calibration measurements and velocity … Show more

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Cited by 20 publications
(18 citation statements)
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References 34 publications
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“…SI-2, lower left sketch). Preliminary spectral measurements with a resolution of 100 μm have been recently reported (23).…”
Section: Discussionmentioning
confidence: 99%
“…SI-2, lower left sketch). Preliminary spectral measurements with a resolution of 100 μm have been recently reported (23).…”
Section: Discussionmentioning
confidence: 99%
“…where E is the Young modulus of silicon oxide [18]. The pressure load induced by the motion of the fluid impinging on the cantilever normally can be written…”
Section: Calibration Of the Strain Gaugementioning
confidence: 99%
“…Five years ago, we have extended this technique of cantilever-based anemometry to the case of low temperature liquid helium flows [18]. We then proposed a method based on a superconducting micro-resonator patterned onto the cantilevered beam.…”
Section: Turbulent Velocity Fluctuationsmentioning
confidence: 99%
“…Silicon micro-cantilevers have today applications in many areas of measurement, as chemical and biological sensors, 1 mass detectors, 2,3 flow meters, 4,5 or force sensors. 6 Thanks to their industrial production with tight tolerances, and the ability to integrate a sharp tip in the fabrication process, they are, for example, ubiquitous in atomic force microscopy (AFM).…”
Section: Introductionmentioning
confidence: 99%