2004
DOI: 10.1016/s0040-6090(03)01066-6
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Can oxygen stabilize chromium nitride?—Characterization of high temperature cycled chromium oxynitride

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Cited by 35 publications
(8 citation statements)
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“…The present data (37 at.%) was obtained using RBS that has high accuracy for quantitative analysis and the RBS measurement error is about 5%. The value of the maximum concentration is slightly different from the data of Wilhartitz et al [5]. This difference seems to mainly originate in the difference in the methods for thin film preparation.…”
Section: Resultscontrasting
confidence: 78%
See 1 more Smart Citation
“…The present data (37 at.%) was obtained using RBS that has high accuracy for quantitative analysis and the RBS measurement error is about 5%. The value of the maximum concentration is slightly different from the data of Wilhartitz et al [5]. This difference seems to mainly originate in the difference in the methods for thin film preparation.…”
Section: Resultscontrasting
confidence: 78%
“…So far, Cr-N-O thin films have been produced by sputtering [2] and arc evaporation [3]. Although most thin films prepared by these methods consist of a two-phase mixture of CrN and Cr 2 O 3 , thin films of single-phase chromium oxynitride have been prepared successfully recently [4,5].…”
Section: Introductionmentioning
confidence: 99%
“…As for CrN, the corrosion resistance and diffusion barrier performance of chromium oxynitride films, have been attributed to the formation of a passivation layer of stable oxides at the surface. Although, several studies have been performed recently on Cr-O-N coatings, to investigate the effect of oxygen on their electronic, structural, morphological [4] and mechanical properties [5], there is no evidence in the scientific literature of studies on the phase stability and oxidation resistance of Cr-O-N coatings. The aim of the present work is to investigate the structural stability, both in air and in vacuum environments, of Cr-O-N films deposited by reactive arc evaporation with respect to their compositional, structural, morphological and mechanical properties.…”
Section: Introductionmentioning
confidence: 99%
“…The thickness of top deposition layer is approximately 100 nm, while the SAD pattern is in an amorphous structure which can be accounted by the high content of oxygen. P.Wilhartitz et al 46 found that oxygen in nitrided layer played a role in stabilizing the fine crystalline structure. The XPS investigations confirmed that O-N bonding could be detected in this layer (Fig.7).…”
mentioning
confidence: 99%