Calibration of tri-axial MEMS accelerometers in the low-frequency range – Part 2: Uncertainty assessment

D’Emilia, Giulio; Gaspari, Antonella; Mazzoleni, Fabrizio; Natale, Emanuela; Schiavi, Alessandro

doi:10.5194/jsss-7-403-2018

Cited by 22 publications

(11 citation statements)

References 12 publications

(13 reference statements)

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“…Actually, the calibration of the individual sensing element, by using the set-up shown in Figure 5 , was affected by some systematic errors induced by the vibrational modes of the hexagonal prism mass, and by the small (but not negligible) damping of the glue. The errors depend on both frequency and amplitude and cannot be experimentally evaluated with this calibration setup; thus, it needs to be considered in the evaluation of the overall uncertainty [ 46 , 47 , 48 ].…”

Section: Methodsmentioning

confidence: 99%

Highly Reliable Multicomponent MEMS Sensor for Predictive Maintenance Management of Rolling Bearings

et al. 2023

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In the field of vibration monitoring and control, the use of low-cost multicomponent MEMS-based accelerometer sensors is nowadays increasingly widespread. Such sensors allow implementing lightweight monitoring systems with low management costs, low power consumption and a small size. However, for the monitoring systems to provide trustworthy and meaningful data, the high accuracy and reliability of sensors are essential requirements. Consequently, a metrological approach to the calibration of multi-component accelerometer sensors, including appropriate uncertainty evaluations, are necessary to guarantee traceability and reliability in the frequency domain of data provided, which nowadays is not fully available. In addition, recently developed metrological characterizations at the microscale level allow to provide detailed and accurate quantification of the enhanced technical performance and the responsiveness of these sensors. In this paper, a dynamic calibration procedure is applied to provide the sensitivity parameters of a low-cost, multicomponent MEMS sensor accelerometer prototype (MDUT), designed, developed and realized at the University of Siena, conceived for rolling bearings vibration monitoring in a broad frequency domain (from 10 Hz up to 25 kHz). The calibration and the metrological characterization of the MDUT are carried out by comparison to a reference standard transducer, at the Primary Vibration Laboratory of the National Institute of Metrological Research (INRiM).

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Section: Methodsmentioning

confidence: 99%

Highly Reliable Multicomponent MEMS Sensor for Predictive Maintenance Management of Rolling Bearings

et al. 2023

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“…These mistakes include 0-bias, scale-component, non-orthogonal, among others. By [44] indicates the 0-bias error resulting from the sensor yields of the MEMS triaxial accelerometer not being zero while the suitable yields are. This method estimates calibrating parameters based on the model is built using (1) [44].…”

Section: Maximum Likelihoodmentioning

confidence: 99%

Self-test and calibration methods for micro electro-mechanical systems

Ahmed

Al-Gayem²

2023

TELKOMNIKA

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For the testing of micro electro-mechanical systems, we propose a taxonomy of built-in self-testing methods. These solutions that are non-intrusive, cost-effective and are typically non-intrusive during the testing process are being actively sought after as the cost of micro-electro-mechanical systems (MEMS) testing can account for 50% of the total cost of the end product. The selection of testing methods is analyzed extensively, and a classification table for such methods is presented according to three performance metrics: ease of application, test application, usefulness. Performance table also provides a field test domain for the method. While built-in-self-test (BIST) methods do depend on the application at hand, utilizing the inherent multimodal sensing capability of most sensors could be a promising approach for effective built-in self-test.

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“…IMEKO 24 th TC3, 14 th TC5, 6 th TC16 and 5 th TC22 International Conference 11 -13 October 2022, Cavtat-Dubrovnik, Croatia 3 of 4 It has been reported [7,8] that this method is susceptible to transverse sensitivity effects. Considering this work, transverse sensitivity effects were investigated as a source of the offsets in sensitivity values.…”

Section: Cube Tri-axial Accelerometermentioning

confidence: 99%

Self-Made Tri-Axial Accelerometer Design Considerations for Validation of Simultaneous Multi Axis Accelerometer Calibration System

Veldman¹

2023

Proceedings of the 5th IMEKO TC22 Conference on Vibration Measurement

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This paper describes geometric design consideration for the creation (manufacture) of a triaxial accelerometer intended for the validation of multi axis calibration systems that implements simultaneous axis calibration methods. Two mounting geometries were investigated, and the results obtained using them are reported. The one configuration, a cube with counterweights. The second configuration see the accelerometers mounted on "recessed" faces, aiming at placing (aligning) the individual accelerometers close to the vibration excitation vector.

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Calibration of tri-axial MEMS accelerometers in the low-frequency range – Part 2: Uncertainty assessment

Cited by 22 publications

References 12 publications

Highly Reliable Multicomponent MEMS Sensor for Predictive Maintenance Management of Rolling Bearings

Highly Reliable Multicomponent MEMS Sensor for Predictive Maintenance Management of Rolling Bearings

Self-test and calibration methods for micro electro-mechanical systems

Self-Made Tri-Axial Accelerometer Design Considerations for Validation of Simultaneous Multi Axis Accelerometer Calibration System

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