Calibration-free quantitative surface topography reconstruction in scanning electron microscopy

Faber, Enne; Martínez-Martínez, D.; Мансилла, C.; Ocelík, Václav; Hosson, J.Th.M. De

doi:10.1016/j.ultramic.2014.08.009

Cited by 4 publications

(4 citation statements)

References 16 publications

(29 reference statements)

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“…The inspiration to our current work was the success that shape analysis enjoyed with these segmentation-free feature descriptors. There are, however, reconstruction-based imaging techniques that can directly lead to easier to segment datasets [21,22] as compared to the simple micrographs used here.…”

Section: Related Workmentioning

confidence: 99%

Segmentation-free image processing and analysis of precipitate shapes in 2D and 3D

Bales

Pollock

Petzold

2017

Modelling Simul. Mater. Sci. Eng.

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Segmentation based image analysis techniques are routinely employed for quantitative analysis of complex microstructures containing two or more phases. The primary advantage of these approaches is that spatial information on the distribution of phases is retained, enabling subjective judgements of the quality of the segmentation and subsequent analysis process. The downside is that computing micrograph segmentations with data from morphologically complex microstructures gathered with error-prone detectors is challenging and, if no special care is taken, the artifacts of the segmentation will make any subsequent analysis and conclusions uncertain. In this paper we demonstrate, using a two phase nickel-base superalloy microstructure as a model system, a new methodology for analysis of precipitate shapes using a segmentation-free approach based on the histogram of oriented gradients feature descriptor, a classic tool in image analysis. The benefits of this methodology for analysis of microstructure in two and three-dimensions are demonstrated.

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Section: Related Workmentioning

confidence: 99%

Segmentation-free image processing and analysis of precipitate shapes in 2D and 3D

Bales

Pollock

Petzold

2017

Modelling Simul. Mater. Sci. Eng.

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“…Therefore, the use of statistical methods to quantify the measurement and the conditions used are strongly recommended (Mansilla et al 2013(Mansilla et al , 2014. The final step consists on the reconstruction of the surface from the displacement fields obtained by DIC by a mathematical approach that considers the rotation of the object and the change in working distance (Faber et al 2015).…”

Section: Preparation Of Diatom Samples and Image Acquisitionmentioning

confidence: 99%

“…The mathematical foundation of this method is described in detail by Faber et al (2015), and therefore, only a simplified explanation will be presented here.…”

Section: D Reconstructionmentioning

confidence: 99%

On the 3D reconstruction of diatom frustules: a novel method, applications, and limitations

et al. 2015

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Because of the importance of diatoms and the lack of information about their third dimension, a new method for the 3D reconstruction is explored, based on digital image correlation of several scanning electron microscope images. The accuracy of the method to reconstruct both centric and pennate (symmetrical and asymmetrical) diatoms was shown, independently of valve size and shape, and considering not only the general frustule morphology but also the intricate ornamentation. Several measurements were obtained, such as of the surface and projected areas and the valve volume. These results were validated by focused ion beam transverse cross section of one valve, and the quantitative results were compared with geometric models commonly applied. Furthermore, direct volume calculations based on 3D reconstructions have several advantages, such as it has higher taxonomic accuracy than the methods based on light microscopy; it solves the problems of the light halos; it allows the precise measurement of all linear dimensions, including the often neglected third dimension; natural samples can be measured directly; and it provides an exact estimate of cell volume, independently of its shape or alterations due to life cycle stage. This approach provides therefore a simple way to measure the morphological features of diatoms, even at a nanoscale, and can be applied to other microorganisms commonly illustrated by means of scanning electron microscopy.

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“…To obtain structure height, or a 3D map of the surface in general, combinations of tools and techniques are being employed such as stereo vision, structure from motion, or stereo-photogrammetry (Faber et al, 2014; Eulitz & Reiss, 2015; Tafti et al, 2015; Shanklin, 2016). In these methods, a sample is illuminated and/or viewed at different angles by introducing extra sources, detectors, and/or tilting the sample such that feature height is measured as a lateral distance, or at least can be calculated from the projection.…”

Section: Introductionmentioning

confidence: 99%

Estimating Step Heights from Top-Down SEM Images

Arat

Bolten

Zonnevylle³

et al. 2019

Microsc Microanal

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Scanning electron microscopy (SEM) is one of the most common inspection methods in the semiconductor industry and in research labs. To extract the height of structures using SEM images, various techniques have been used, such as tilting a sample, or modifying the SEM tool with extra sources and/or detectors. However, none of these techniques focused on extraction of height information directly from top-down images. In this work, using Monte Carlo simulations, we studied the relation between step height and the emission of secondary electrons (SEs) resulting from exposure with primary electrons at different energies. It is found that part of the SE signal, when scanning over a step edge, is determined by the step height rather than the geometry of the step edge. We present a way to quantify this, arriving at a method to determine the height of structures from top-down SEM images. The method is demonstrated on three different samples using two different SEM tools, and atomic force microscopy is used to measure the step height of the samples. The results obtained are in qualitative agreement with the results from the Monte Carlo simulations.

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Calibration-free quantitative surface topography reconstruction in scanning electron microscopy

Cited by 4 publications

References 16 publications

Segmentation-free image processing and analysis of precipitate shapes in 2D and 3D

Segmentation-free image processing and analysis of precipitate shapes in 2D and 3D

On the 3D reconstruction of diatom frustules: a novel method, applications, and limitations

Estimating Step Heights from Top-Down SEM Images

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