1984
DOI: 10.1117/12.7973309
|View full text |Cite
|
Sign up to set email alerts
|

Calculation Of Surface Statistics From Light Scatter

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
3
1
1

Citation Types

0
24
0

Year Published

1984
1984
2007
2007

Publication Types

Select...
3
3

Relationship

0
6

Authors

Journals

citations
Cited by 61 publications
(24 citation statements)
references
References 0 publications
0
24
0
Order By: Relevance
“…The orientation of polishing was determined from a light scatter surface roughness measurement. 28 The RMS surface roughness of a freshly polished copper coupons was 0.015 pm. After exposure to air for several weeks, the RMS surface roughness increased to 0.17 pm.…”
Section: Coppermentioning
confidence: 99%
“…The orientation of polishing was determined from a light scatter surface roughness measurement. 28 The RMS surface roughness of a freshly polished copper coupons was 0.015 pm. After exposure to air for several weeks, the RMS surface roughness increased to 0.17 pm.…”
Section: Coppermentioning
confidence: 99%
“…Many of the works on inverse scattering have focused on the retrieval of some statistical properties of the surface under study [8,9,10,11,12]. The reconstruction of surface profiles from far-field amplitude data has been considered by Wombel and DeSanto [13,14], Quartel and Sheppard [15,16], and Macías et al [17].…”
Section: Introductionmentioning
confidence: 98%
“…Different optical techniques were used to measure surface roughness. The lightscattering technique for surface roughness measurements has received wide attention in the past few decades [9][10][11][12][13][14][15]. The theoretical background of this technique is based on Beckmann's rough-surface scattering model [16,17].…”
Section: Introductionmentioning
confidence: 99%